JPS63281079A - 半導体装置の検査装置 - Google Patents

半導体装置の検査装置

Info

Publication number
JPS63281079A
JPS63281079A JP11639587A JP11639587A JPS63281079A JP S63281079 A JPS63281079 A JP S63281079A JP 11639587 A JP11639587 A JP 11639587A JP 11639587 A JP11639587 A JP 11639587A JP S63281079 A JPS63281079 A JP S63281079A
Authority
JP
Japan
Prior art keywords
semiconductor device
probe needle
support plate
relay
inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11639587A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0432347B2 (enrdf_load_stackoverflow
Inventor
Mitsuyoshi Nakada
中田　三善
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
COMPUTER APURIKEESHIYON KK
Original Assignee
COMPUTER APURIKEESHIYON KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by COMPUTER APURIKEESHIYON KK filed Critical COMPUTER APURIKEESHIYON KK
Priority to JP11639587A priority Critical patent/JPS63281079A/ja
Publication of JPS63281079A publication Critical patent/JPS63281079A/ja
Publication of JPH0432347B2 publication Critical patent/JPH0432347B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP11639587A 1987-05-12 1987-05-12 半導体装置の検査装置 Granted JPS63281079A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11639587A JPS63281079A (ja) 1987-05-12 1987-05-12 半導体装置の検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11639587A JPS63281079A (ja) 1987-05-12 1987-05-12 半導体装置の検査装置

Publications (2)

Publication Number Publication Date
JPS63281079A true JPS63281079A (ja) 1988-11-17
JPH0432347B2 JPH0432347B2 (enrdf_load_stackoverflow) 1992-05-29

Family

ID=14685977

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11639587A Granted JPS63281079A (ja) 1987-05-12 1987-05-12 半導体装置の検査装置

Country Status (1)

Country Link
JP (1) JPS63281079A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007080644A1 (ja) * 2006-01-13 2007-07-19 Advantest Corporation コネクタハウジングブロック、インターフェイス部材および電子部品試験装置
US7458837B2 (en) 2006-01-13 2008-12-02 Advantest Corporation Connector housing block, interface member and electronic device testing apparatus

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007080644A1 (ja) * 2006-01-13 2007-07-19 Advantest Corporation コネクタハウジングブロック、インターフェイス部材および電子部品試験装置
US7458837B2 (en) 2006-01-13 2008-12-02 Advantest Corporation Connector housing block, interface member and electronic device testing apparatus
JPWO2007080644A1 (ja) * 2006-01-13 2009-06-11 株式会社アドバンテスト コネクタハウジングブロック、インターフェイス部材および電子部品試験装置
JP4488438B2 (ja) * 2006-01-13 2010-06-23 株式会社アドバンテスト コネクタハウジングブロック、インターフェイス部材および電子部品試験装置

Also Published As

Publication number Publication date
JPH0432347B2 (enrdf_load_stackoverflow) 1992-05-29

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