JPS6326821Y2 - - Google Patents
Info
- Publication number
- JPS6326821Y2 JPS6326821Y2 JP1984174259U JP17425984U JPS6326821Y2 JP S6326821 Y2 JPS6326821 Y2 JP S6326821Y2 JP 1984174259 U JP1984174259 U JP 1984174259U JP 17425984 U JP17425984 U JP 17425984U JP S6326821 Y2 JPS6326821 Y2 JP S6326821Y2
- Authority
- JP
- Japan
- Prior art keywords
- pellicle
- reticle
- film
- dust
- fixed frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000012528 membrane Substances 0.000 claims description 14
- 229910052751 metal Inorganic materials 0.000 claims description 12
- 239000002184 metal Substances 0.000 claims description 12
- 239000000428 dust Substances 0.000 description 7
- 238000004140 cleaning Methods 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000012776 electronic material Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229920001220 nitrocellulos Polymers 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984174259U JPS6326821Y2 (de) | 1984-11-19 | 1984-11-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984174259U JPS6326821Y2 (de) | 1984-11-19 | 1984-11-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6189852U JPS6189852U (de) | 1986-06-11 |
| JPS6326821Y2 true JPS6326821Y2 (de) | 1988-07-20 |
Family
ID=30731885
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984174259U Expired JPS6326821Y2 (de) | 1984-11-19 | 1984-11-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6326821Y2 (de) |
-
1984
- 1984-11-19 JP JP1984174259U patent/JPS6326821Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6189852U (de) | 1986-06-11 |
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