JPS6189852U - - Google Patents
Info
- Publication number
- JPS6189852U JPS6189852U JP1984174259U JP17425984U JPS6189852U JP S6189852 U JPS6189852 U JP S6189852U JP 1984174259 U JP1984174259 U JP 1984174259U JP 17425984 U JP17425984 U JP 17425984U JP S6189852 U JPS6189852 U JP S6189852U
- Authority
- JP
- Japan
- Prior art keywords
- pellicle
- membrane
- fixed frame
- attached
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012528 membrane Substances 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 4
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984174259U JPS6326821Y2 (de) | 1984-11-19 | 1984-11-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984174259U JPS6326821Y2 (de) | 1984-11-19 | 1984-11-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6189852U true JPS6189852U (de) | 1986-06-11 |
| JPS6326821Y2 JPS6326821Y2 (de) | 1988-07-20 |
Family
ID=30731885
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984174259U Expired JPS6326821Y2 (de) | 1984-11-19 | 1984-11-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6326821Y2 (de) |
-
1984
- 1984-11-19 JP JP1984174259U patent/JPS6326821Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6326821Y2 (de) | 1988-07-20 |