JPS6325340Y2 - - Google Patents

Info

Publication number
JPS6325340Y2
JPS6325340Y2 JP20190583U JP20190583U JPS6325340Y2 JP S6325340 Y2 JPS6325340 Y2 JP S6325340Y2 JP 20190583 U JP20190583 U JP 20190583U JP 20190583 U JP20190583 U JP 20190583U JP S6325340 Y2 JPS6325340 Y2 JP S6325340Y2
Authority
JP
Japan
Prior art keywords
valve
exhaust system
pressure
tmp3
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP20190583U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60110685U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP20190583U priority Critical patent/JPS60110685U/ja
Publication of JPS60110685U publication Critical patent/JPS60110685U/ja
Application granted granted Critical
Publication of JPS6325340Y2 publication Critical patent/JPS6325340Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP20190583U 1983-12-28 1983-12-28 タ−ボ分子ポンプを用いた排気系 Granted JPS60110685U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20190583U JPS60110685U (ja) 1983-12-28 1983-12-28 タ−ボ分子ポンプを用いた排気系

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20190583U JPS60110685U (ja) 1983-12-28 1983-12-28 タ−ボ分子ポンプを用いた排気系

Publications (2)

Publication Number Publication Date
JPS60110685U JPS60110685U (ja) 1985-07-26
JPS6325340Y2 true JPS6325340Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-07-11

Family

ID=30764124

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20190583U Granted JPS60110685U (ja) 1983-12-28 1983-12-28 タ−ボ分子ポンプを用いた排気系

Country Status (1)

Country Link
JP (1) JPS60110685U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0720395Y2 (ja) * 1988-02-03 1995-05-15 株式会社大阪真空機器製作所 真空排気装置
JP4168642B2 (ja) * 2002-02-28 2008-10-22 東京エレクトロン株式会社 被処理体収納容器体及び処理システム

Also Published As

Publication number Publication date
JPS60110685U (ja) 1985-07-26

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