JPS6323771Y2 - - Google Patents

Info

Publication number

JPS6323771Y2

JPS6323771Y2 JP8472979U JP8472979U JPS6323771Y2 JP S6323771 Y2 JPS6323771 Y2 JP S6323771Y2 JP 8472979 U JP8472979 U JP 8472979U JP 8472979 U JP8472979 U JP 8472979U JP S6323771 Y2 JPS6323771 Y2 JP S6323771Y2

Authority

JP

Japan

Prior art keywords

magnetic

thin film

magnetic thin

metal magnetic

metal

Prior art date

1979-06-20

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

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• 239000010409 thin film Substances 0.000 claims description 28
• 229910052751 metal Inorganic materials 0.000 claims description 21
• 239000002184 metal Substances 0.000 claims description 21
• 229910000859 α-Fe Inorganic materials 0.000 claims description 6
• 229910018605 Ni—Zn Inorganic materials 0.000 claims description 5
• 238000007747 plating Methods 0.000 claims description 3
• 239000012808 vapor phase Substances 0.000 claims description 2
• 239000000696 magnetic material Substances 0.000 description 8
• 239000010408 film Substances 0.000 description 5
• 230000007423 decrease Effects 0.000 description 4
• 230000004907 flux Effects 0.000 description 4
• 230000035699 permeability Effects 0.000 description 4
• 229910000702 sendust Inorganic materials 0.000 description 4
• 125000006850 spacer group Chemical group 0.000 description 4
• 238000004804 winding Methods 0.000 description 4
• 229910004298 SiO 2 Inorganic materials 0.000 description 3
• 239000011810 insulating material Substances 0.000 description 3
• 229910045601 alloy Inorganic materials 0.000 description 2
• 239000000956 alloy Substances 0.000 description 2
• 230000006866 deterioration Effects 0.000 description 2
• 230000002500 effect on skin Effects 0.000 description 2
• 238000007733 ion plating Methods 0.000 description 2
• 229910000889 permalloy Inorganic materials 0.000 description 2
• 238000004544 sputter deposition Methods 0.000 description 2
• 238000007740 vapor deposition Methods 0.000 description 2
• 229910021364 Al-Si alloy Inorganic materials 0.000 description 1
• 229910001017 Alperm Inorganic materials 0.000 description 1
• 238000000151 deposition Methods 0.000 description 1
• 238000009413 insulation Methods 0.000 description 1
• 238000010030 laminating Methods 0.000 description 1
• 238000004519 manufacturing process Methods 0.000 description 1
• 150000002739 metals Chemical class 0.000 description 1
• 238000000034 method Methods 0.000 description 1
• 239000012071 phase Substances 0.000 description 1
• 238000005498 polishing Methods 0.000 description 1
• 230000035945 sensitivity Effects 0.000 description 1