JPS6323680B2 - - Google Patents
Info
- Publication number
- JPS6323680B2 JPS6323680B2 JP20550683A JP20550683A JPS6323680B2 JP S6323680 B2 JPS6323680 B2 JP S6323680B2 JP 20550683 A JP20550683 A JP 20550683A JP 20550683 A JP20550683 A JP 20550683A JP S6323680 B2 JPS6323680 B2 JP S6323680B2
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- thin film
- film
- thick film
- thick
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010408 film Substances 0.000 claims description 67
- 239000010409 thin film Substances 0.000 claims description 60
- 238000000034 method Methods 0.000 claims description 29
- 239000000758 substrate Substances 0.000 claims description 19
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 230000008021 deposition Effects 0.000 claims description 2
- 238000005530 etching Methods 0.000 description 23
- 229910052751 metal Inorganic materials 0.000 description 14
- 239000002184 metal Substances 0.000 description 14
- 239000010410 layer Substances 0.000 description 13
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 10
- 229910052804 chromium Inorganic materials 0.000 description 9
- 239000011651 chromium Substances 0.000 description 9
- 238000005516 engineering process Methods 0.000 description 9
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 7
- 229910052802 copper Inorganic materials 0.000 description 7
- 239000010949 copper Substances 0.000 description 7
- 239000011229 interlayer Substances 0.000 description 6
- 150000002739 metals Chemical class 0.000 description 5
- 238000000206 photolithography Methods 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- XMPZTFVPEKAKFH-UHFFFAOYSA-P ceric ammonium nitrate Chemical compound [NH4+].[NH4+].[Ce+4].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O XMPZTFVPEKAKFH-UHFFFAOYSA-P 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- VLTRZXGMWDSKGL-UHFFFAOYSA-N perchloric acid Chemical compound OCl(=O)(=O)=O VLTRZXGMWDSKGL-UHFFFAOYSA-N 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- GXDVEXJTVGRLNW-UHFFFAOYSA-N [Cr].[Cu] Chemical compound [Cr].[Cu] GXDVEXJTVGRLNW-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Production Of Multi-Layered Print Wiring Board (AREA)
- Manufacturing Of Printed Wiring (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20550683A JPS6097690A (ja) | 1983-11-01 | 1983-11-01 | 厚膜薄膜配線基板の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20550683A JPS6097690A (ja) | 1983-11-01 | 1983-11-01 | 厚膜薄膜配線基板の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6097690A JPS6097690A (ja) | 1985-05-31 |
| JPS6323680B2 true JPS6323680B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-05-17 |
Family
ID=16507986
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20550683A Granted JPS6097690A (ja) | 1983-11-01 | 1983-11-01 | 厚膜薄膜配線基板の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6097690A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1983
- 1983-11-01 JP JP20550683A patent/JPS6097690A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6097690A (ja) | 1985-05-31 |