JPS63232932A - 修正研磨方法およびその装置 - Google Patents

修正研磨方法およびその装置

Info

Publication number
JPS63232932A
JPS63232932A JP6259287A JP6259287A JPS63232932A JP S63232932 A JPS63232932 A JP S63232932A JP 6259287 A JP6259287 A JP 6259287A JP 6259287 A JP6259287 A JP 6259287A JP S63232932 A JPS63232932 A JP S63232932A
Authority
JP
Japan
Prior art keywords
polishing
polished
tool
polishing tool
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6259287A
Other languages
English (en)
Japanese (ja)
Other versions
JPH05171B2 (enrdf_load_stackoverflow
Inventor
Manabu Ando
学 安藤
Nobuo Nakamura
宣夫 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP6259287A priority Critical patent/JPS63232932A/ja
Publication of JPS63232932A publication Critical patent/JPS63232932A/ja
Priority to US07/401,477 priority patent/US4956944A/en
Publication of JPH05171B2 publication Critical patent/JPH05171B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
JP6259287A 1987-03-19 1987-03-19 修正研磨方法およびその装置 Granted JPS63232932A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP6259287A JPS63232932A (ja) 1987-03-19 1987-03-19 修正研磨方法およびその装置
US07/401,477 US4956944A (en) 1987-03-19 1989-08-29 Polishing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6259287A JPS63232932A (ja) 1987-03-19 1987-03-19 修正研磨方法およびその装置

Publications (2)

Publication Number Publication Date
JPS63232932A true JPS63232932A (ja) 1988-09-28
JPH05171B2 JPH05171B2 (enrdf_load_stackoverflow) 1993-01-05

Family

ID=13204748

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6259287A Granted JPS63232932A (ja) 1987-03-19 1987-03-19 修正研磨方法およびその装置

Country Status (1)

Country Link
JP (1) JPS63232932A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0788759A (ja) * 1993-09-20 1995-04-04 Nec Corp ウェーハ研磨装置
EP0865874A3 (en) * 1997-03-21 2000-05-17 Canon Kabushiki Kaisha Polishing apparatus and method

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101866438B1 (ko) * 2012-06-29 2018-06-11 동우 화인켐 주식회사 점착제 조성물

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS618269A (ja) * 1984-06-22 1986-01-14 Canon Inc 曲面研摩機
JPS6133665A (ja) * 1984-07-27 1986-02-17 新技術開発事業団 人工心肺装置におけるコラプス解消装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS618269A (ja) * 1984-06-22 1986-01-14 Canon Inc 曲面研摩機
JPS6133665A (ja) * 1984-07-27 1986-02-17 新技術開発事業団 人工心肺装置におけるコラプス解消装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0788759A (ja) * 1993-09-20 1995-04-04 Nec Corp ウェーハ研磨装置
EP0865874A3 (en) * 1997-03-21 2000-05-17 Canon Kabushiki Kaisha Polishing apparatus and method
US6299506B2 (en) 1997-03-21 2001-10-09 Canon Kabushiki Kaisha Polishing apparatus including holder and polishing head with rotational axis of polishing head offset from rotational axis of holder and method of using

Also Published As

Publication number Publication date
JPH05171B2 (enrdf_load_stackoverflow) 1993-01-05

Similar Documents

Publication Publication Date Title
US5551908A (en) Centerless grinder and wheel truing device therefor
JPS63232932A (ja) 修正研磨方法およびその装置
JPH032628B2 (enrdf_load_stackoverflow)
JP4208364B2 (ja) 球面創成装置および球面創成方法
JPH09168924A (ja) ナットねじ溝のラップ加工方法
JP3212813B2 (ja) 内面研削盤及びその研削方法
JP2574278B2 (ja) ト−リツク面加工装置
JP2001025943A (ja) 円筒状工作物の外周面研削装置および研削方法
JPH0521706B2 (enrdf_load_stackoverflow)
JPH08336753A (ja) 被加工物の研磨方法及びその研磨装置
JPH03294163A (ja) 曲面加工装置
JP3979421B2 (ja) スプラインボール溝を研削する装置
JPH11170167A (ja) 光学素子の研磨方法及び研磨装置
US7150676B2 (en) Dual motion polishing tool
JP2721642B2 (ja) 傾斜ラッピング加工方法
JP2001179580A (ja) 円筒ワークの端部加工装置
JP2001038592A (ja) 研磨方法および研磨装置
JPS63232944A (ja) 研磨工具
JPH0430961A (ja) トーリック形状および非球面形状レンズの加工装置及び加工方法
JPS58211854A (ja) ロ−タリバルブの面取り加工法
JPH0632887B2 (ja) 面取り加工方法
JP2001259973A (ja) 円筒状工作物の外周面研削方法および研削装置
JP2000271845A (ja) ワーク内径のスプラインボール溝研削方法と、研削砥石および研削砥石のドレス方法
JPH09254002A (ja) 研磨方法および研磨装置
JPH0373424B2 (enrdf_load_stackoverflow)

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees