JPS63230294A - レ−ザ加工装置用の煙除去装置 - Google Patents

レ−ザ加工装置用の煙除去装置

Info

Publication number
JPS63230294A
JPS63230294A JP62010496A JP1049687A JPS63230294A JP S63230294 A JPS63230294 A JP S63230294A JP 62010496 A JP62010496 A JP 62010496A JP 1049687 A JP1049687 A JP 1049687A JP S63230294 A JPS63230294 A JP S63230294A
Authority
JP
Japan
Prior art keywords
blower
laser beam
laser
fabric
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62010496A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0362517B2 (enrdf_load_stackoverflow
Inventor
Akira Ishii
明 石井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JIDO HOSEI SYST GIJUTSU KENKYU KUMIAI
Original Assignee
JIDO HOSEI SYST GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JIDO HOSEI SYST GIJUTSU KENKYU KUMIAI filed Critical JIDO HOSEI SYST GIJUTSU KENKYU KUMIAI
Priority to JP62010496A priority Critical patent/JPS63230294A/ja
Publication of JPS63230294A publication Critical patent/JPS63230294A/ja
Publication of JPH0362517B2 publication Critical patent/JPH0362517B2/ja
Granted legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1462Nozzles; Features related to nozzles
    • B23K26/1494Maintenance of nozzles

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
JP62010496A 1987-01-20 1987-01-20 レ−ザ加工装置用の煙除去装置 Granted JPS63230294A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62010496A JPS63230294A (ja) 1987-01-20 1987-01-20 レ−ザ加工装置用の煙除去装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62010496A JPS63230294A (ja) 1987-01-20 1987-01-20 レ−ザ加工装置用の煙除去装置

Publications (2)

Publication Number Publication Date
JPS63230294A true JPS63230294A (ja) 1988-09-26
JPH0362517B2 JPH0362517B2 (enrdf_load_stackoverflow) 1991-09-26

Family

ID=11751800

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62010496A Granted JPS63230294A (ja) 1987-01-20 1987-01-20 レ−ザ加工装置用の煙除去装置

Country Status (1)

Country Link
JP (1) JPS63230294A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0618037A1 (en) * 1993-04-02 1994-10-05 International Business Machines Corporation Optics and environmental protection device for laser processing applications
JP2002118076A (ja) * 2000-08-31 2002-04-19 Sharp Corp シリコン膜のエキシマレーザー処理時に多結晶シリコン膜に混入する酸素量を制御する装置
JP2002160087A (ja) * 2000-11-29 2002-06-04 Toppan Forms Co Ltd 排煙機構を備えたレーザ加工装置および方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4882491A (enrdf_load_stackoverflow) * 1972-01-19 1973-11-05
JPS589784A (ja) * 1981-07-10 1983-01-20 ハウニイ−ウエルケ・ケルベル・ウント・コンパニイ・コマンデイ−トゲゼルシヤフト 移動する帯材にパ−フオレ−シヨンを付ける装置
JPS61222698A (ja) * 1985-03-28 1986-10-03 Mitsubishi Electric Corp 汚損除去・脱臭装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4882491A (enrdf_load_stackoverflow) * 1972-01-19 1973-11-05
JPS589784A (ja) * 1981-07-10 1983-01-20 ハウニイ−ウエルケ・ケルベル・ウント・コンパニイ・コマンデイ−トゲゼルシヤフト 移動する帯材にパ−フオレ−シヨンを付ける装置
JPS61222698A (ja) * 1985-03-28 1986-10-03 Mitsubishi Electric Corp 汚損除去・脱臭装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0618037A1 (en) * 1993-04-02 1994-10-05 International Business Machines Corporation Optics and environmental protection device for laser processing applications
JP2002118076A (ja) * 2000-08-31 2002-04-19 Sharp Corp シリコン膜のエキシマレーザー処理時に多結晶シリコン膜に混入する酸素量を制御する装置
JP2002160087A (ja) * 2000-11-29 2002-06-04 Toppan Forms Co Ltd 排煙機構を備えたレーザ加工装置および方法

Also Published As

Publication number Publication date
JPH0362517B2 (enrdf_load_stackoverflow) 1991-09-26

Similar Documents

Publication Publication Date Title
JP6638011B2 (ja) レーザ加工機及びレーザ加工方法
JP2001518018A (ja) レーザ彫刻機若しくはレーザ切断機のための加工ヘッド
JPS63502811A (ja) レ−ザ処理装置
JPS63230294A (ja) レ−ザ加工装置用の煙除去装置
JPH01224196A (ja) レーザ加工装置用の煙除去装置
JPS60206594A (ja) レ−ザ加工装置
JP3880728B2 (ja) 描画装置
JPH0314553B2 (enrdf_load_stackoverflow)
JPS60177984A (ja) レ−ザ加工装置
JPS60177986A (ja) レ−ザ加工装置
JPH09192875A (ja) レーザ加工装置
JPS60177985A (ja) レ−ザ加工装置
JPH07144291A (ja) レーザ加工装置の非点収差低減方法
JP4603936B2 (ja) レーザ加工装置
JPS60177988A (ja) レ−ザ加工装置
JPS60177987A (ja) レ−ザ加工装置
JPH02258189A (ja) レーザ加工機
JPH1177353A (ja) レーザ切断装置
JP2716272B2 (ja) レーザ加工装置
JPS6072692A (ja) レ−ザ加工装置
JP6968126B2 (ja) レーザ加工機の設定方法及びレーザ加工機
JPH0557474A (ja) レーザ加工装置
JPS63299878A (ja) レ−ザ加工装置
JPS60206595A (ja) レ−ザ加工装置
JPS61242783A (ja) レ−ザ加工装置