JPS63229864A - 陽極接合方法 - Google Patents

陽極接合方法

Info

Publication number
JPS63229864A
JPS63229864A JP6487987A JP6487987A JPS63229864A JP S63229864 A JPS63229864 A JP S63229864A JP 6487987 A JP6487987 A JP 6487987A JP 6487987 A JP6487987 A JP 6487987A JP S63229864 A JPS63229864 A JP S63229864A
Authority
JP
Japan
Prior art keywords
cathode
insulating material
alkali
anode
brought
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6487987A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0577306B2 (enrdf_load_stackoverflow
Inventor
Shigeo Ohashi
茂夫 大橋
Takeshi Yamauchi
毅 山内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ishizuka Glass Co Ltd
Original Assignee
Ishizuka Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ishizuka Glass Co Ltd filed Critical Ishizuka Glass Co Ltd
Priority to JP6487987A priority Critical patent/JPS63229864A/ja
Publication of JPS63229864A publication Critical patent/JPS63229864A/ja
Publication of JPH0577306B2 publication Critical patent/JPH0577306B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Ceramic Products (AREA)
  • Joining Of Glass To Other Materials (AREA)
  • Pressure Sensors (AREA)
JP6487987A 1987-03-19 1987-03-19 陽極接合方法 Granted JPS63229864A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6487987A JPS63229864A (ja) 1987-03-19 1987-03-19 陽極接合方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6487987A JPS63229864A (ja) 1987-03-19 1987-03-19 陽極接合方法

Publications (2)

Publication Number Publication Date
JPS63229864A true JPS63229864A (ja) 1988-09-26
JPH0577306B2 JPH0577306B2 (enrdf_load_stackoverflow) 1993-10-26

Family

ID=13270845

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6487987A Granted JPS63229864A (ja) 1987-03-19 1987-03-19 陽極接合方法

Country Status (1)

Country Link
JP (1) JPS63229864A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02141442A (ja) * 1988-11-21 1990-05-30 Mitsubishi Electric Corp シリコンウエハとガラス基板の陽極接合法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02141442A (ja) * 1988-11-21 1990-05-30 Mitsubishi Electric Corp シリコンウエハとガラス基板の陽極接合法

Also Published As

Publication number Publication date
JPH0577306B2 (enrdf_load_stackoverflow) 1993-10-26

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