JPS6322673Y2 - - Google Patents

Info

Publication number
JPS6322673Y2
JPS6322673Y2 JP10484883U JP10484883U JPS6322673Y2 JP S6322673 Y2 JPS6322673 Y2 JP S6322673Y2 JP 10484883 U JP10484883 U JP 10484883U JP 10484883 U JP10484883 U JP 10484883U JP S6322673 Y2 JPS6322673 Y2 JP S6322673Y2
Authority
JP
Japan
Prior art keywords
wafer
substrate body
reference pins
processing table
holding device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10484883U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6013739U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10484883U priority Critical patent/JPS6013739U/ja
Publication of JPS6013739U publication Critical patent/JPS6013739U/ja
Application granted granted Critical
Publication of JPS6322673Y2 publication Critical patent/JPS6322673Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP10484883U 1983-07-06 1983-07-06 ウエハ保持装置 Granted JPS6013739U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10484883U JPS6013739U (ja) 1983-07-06 1983-07-06 ウエハ保持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10484883U JPS6013739U (ja) 1983-07-06 1983-07-06 ウエハ保持装置

Publications (2)

Publication Number Publication Date
JPS6013739U JPS6013739U (ja) 1985-01-30
JPS6322673Y2 true JPS6322673Y2 (US06312121-20011106-C00033.png) 1988-06-22

Family

ID=30246017

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10484883U Granted JPS6013739U (ja) 1983-07-06 1983-07-06 ウエハ保持装置

Country Status (1)

Country Link
JP (1) JPS6013739U (US06312121-20011106-C00033.png)

Also Published As

Publication number Publication date
JPS6013739U (ja) 1985-01-30

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