JPS6322672Y2 - - Google Patents

Info

Publication number
JPS6322672Y2
JPS6322672Y2 JP1983181117U JP18111783U JPS6322672Y2 JP S6322672 Y2 JPS6322672 Y2 JP S6322672Y2 JP 1983181117 U JP1983181117 U JP 1983181117U JP 18111783 U JP18111783 U JP 18111783U JP S6322672 Y2 JPS6322672 Y2 JP S6322672Y2
Authority
JP
Japan
Prior art keywords
suction
wafer
vacuum
tool
semiconductor wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983181117U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6088548U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18111783U priority Critical patent/JPS6088548U/ja
Publication of JPS6088548U publication Critical patent/JPS6088548U/ja
Application granted granted Critical
Publication of JPS6322672Y2 publication Critical patent/JPS6322672Y2/ja
Granted legal-status Critical Current

Links

JP18111783U 1983-11-22 1983-11-22 半導体ウエ−ハの真空吸着具 Granted JPS6088548U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18111783U JPS6088548U (ja) 1983-11-22 1983-11-22 半導体ウエ−ハの真空吸着具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18111783U JPS6088548U (ja) 1983-11-22 1983-11-22 半導体ウエ−ハの真空吸着具

Publications (2)

Publication Number Publication Date
JPS6088548U JPS6088548U (ja) 1985-06-18
JPS6322672Y2 true JPS6322672Y2 (en, 2012) 1988-06-22

Family

ID=30392542

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18111783U Granted JPS6088548U (ja) 1983-11-22 1983-11-22 半導体ウエ−ハの真空吸着具

Country Status (1)

Country Link
JP (1) JPS6088548U (en, 2012)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0530030Y2 (en, 2012) * 1987-04-23 1993-07-30
US4773687A (en) * 1987-05-22 1988-09-27 American Telephone And Telegraph Company, At&T Technologies, Inc. Wafer handler

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4957498A (en, 2012) * 1972-10-04 1974-06-04
JPS52139767U (en, 2012) * 1976-04-16 1977-10-22

Also Published As

Publication number Publication date
JPS6088548U (ja) 1985-06-18

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