JPS63216330A - エピタキシャル・ウエハの滑り線及び転位の発生を抑制する方法 - Google Patents

エピタキシャル・ウエハの滑り線及び転位の発生を抑制する方法

Info

Publication number
JPS63216330A
JPS63216330A JP62040477A JP4047787A JPS63216330A JP S63216330 A JPS63216330 A JP S63216330A JP 62040477 A JP62040477 A JP 62040477A JP 4047787 A JP4047787 A JP 4047787A JP S63216330 A JPS63216330 A JP S63216330A
Authority
JP
Japan
Prior art keywords
substrate
recess
diameter
receptor
epitaxial
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62040477A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0573253B2 (enExample
Inventor
サン−ミン　ラン
ヂァウ　ソン　サン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
INSUCHI OBU NUCLEAR ENERG RES
Original Assignee
INSUCHI OBU NUCLEAR ENERG RES
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by INSUCHI OBU NUCLEAR ENERG RES filed Critical INSUCHI OBU NUCLEAR ENERG RES
Priority to JP62040477A priority Critical patent/JPS63216330A/ja
Publication of JPS63216330A publication Critical patent/JPS63216330A/ja
Publication of JPH0573253B2 publication Critical patent/JPH0573253B2/ja
Granted legal-status Critical Current

Links

JP62040477A 1987-02-25 1987-02-25 エピタキシャル・ウエハの滑り線及び転位の発生を抑制する方法 Granted JPS63216330A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62040477A JPS63216330A (ja) 1987-02-25 1987-02-25 エピタキシャル・ウエハの滑り線及び転位の発生を抑制する方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62040477A JPS63216330A (ja) 1987-02-25 1987-02-25 エピタキシャル・ウエハの滑り線及び転位の発生を抑制する方法

Publications (2)

Publication Number Publication Date
JPS63216330A true JPS63216330A (ja) 1988-09-08
JPH0573253B2 JPH0573253B2 (enExample) 1993-10-14

Family

ID=12581697

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62040477A Granted JPS63216330A (ja) 1987-02-25 1987-02-25 エピタキシャル・ウエハの滑り線及び転位の発生を抑制する方法

Country Status (1)

Country Link
JP (1) JPS63216330A (enExample)

Also Published As

Publication number Publication date
JPH0573253B2 (enExample) 1993-10-14

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