JPS63216330A - エピタキシャル・ウエハの滑り線及び転位の発生を抑制する方法 - Google Patents
エピタキシャル・ウエハの滑り線及び転位の発生を抑制する方法Info
- Publication number
- JPS63216330A JPS63216330A JP4047787A JP4047787A JPS63216330A JP S63216330 A JPS63216330 A JP S63216330A JP 4047787 A JP4047787 A JP 4047787A JP 4047787 A JP4047787 A JP 4047787A JP S63216330 A JPS63216330 A JP S63216330A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- recess
- diameter
- receptor
- epitaxial
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 20
- 239000000758 substrate Substances 0.000 claims description 112
- 239000013078 crystal Substances 0.000 claims description 12
- 238000010438 heat treatment Methods 0.000 claims description 9
- 239000004065 semiconductor Substances 0.000 claims description 7
- 230000008646 thermal stress Effects 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 6
- 238000009826 distribution Methods 0.000 claims description 3
- 238000012546 transfer Methods 0.000 claims description 3
- 238000013461 design Methods 0.000 claims description 2
- 238000005229 chemical vapour deposition Methods 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 39
- 238000000151 deposition Methods 0.000 description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 11
- 238000005137 deposition process Methods 0.000 description 11
- 229910052710 silicon Inorganic materials 0.000 description 11
- 239000010703 silicon Substances 0.000 description 11
- 238000006243 chemical reaction Methods 0.000 description 10
- 230000007547 defect Effects 0.000 description 10
- 230000008021 deposition Effects 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 229910002804 graphite Inorganic materials 0.000 description 4
- 239000010439 graphite Substances 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 2
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 150000003377 silicon compounds Chemical class 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 1
- 239000005046 Chlorosilane Substances 0.000 description 1
- 229920000742 Cotton Polymers 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- WSCXZJCHVCRGHV-UHFFFAOYSA-N chloro(disilanylsilyl)silane Chemical compound [SiH3][SiH2][SiH2][SiH2]Cl WSCXZJCHVCRGHV-UHFFFAOYSA-N 0.000 description 1
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000005049 silicon tetrachloride Substances 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4047787A JPS63216330A (ja) | 1987-02-25 | 1987-02-25 | エピタキシャル・ウエハの滑り線及び転位の発生を抑制する方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4047787A JPS63216330A (ja) | 1987-02-25 | 1987-02-25 | エピタキシャル・ウエハの滑り線及び転位の発生を抑制する方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63216330A true JPS63216330A (ja) | 1988-09-08 |
| JPH0573253B2 JPH0573253B2 (enrdf_load_stackoverflow) | 1993-10-14 |
Family
ID=12581697
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4047787A Granted JPS63216330A (ja) | 1987-02-25 | 1987-02-25 | エピタキシャル・ウエハの滑り線及び転位の発生を抑制する方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63216330A (enrdf_load_stackoverflow) |
-
1987
- 1987-02-25 JP JP4047787A patent/JPS63216330A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0573253B2 (enrdf_load_stackoverflow) | 1993-10-14 |
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