JPS6320354U - - Google Patents

Info

Publication number
JPS6320354U
JPS6320354U JP11408886U JP11408886U JPS6320354U JP S6320354 U JPS6320354 U JP S6320354U JP 11408886 U JP11408886 U JP 11408886U JP 11408886 U JP11408886 U JP 11408886U JP S6320354 U JPS6320354 U JP S6320354U
Authority
JP
Japan
Prior art keywords
detector
lens
optical axis
respect
secondary electrons
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11408886U
Other languages
English (en)
Japanese (ja)
Other versions
JPH059808Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11408886U priority Critical patent/JPH059808Y2/ja
Publication of JPS6320354U publication Critical patent/JPS6320354U/ja
Application granted granted Critical
Publication of JPH059808Y2 publication Critical patent/JPH059808Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP11408886U 1986-07-25 1986-07-25 Expired - Lifetime JPH059808Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11408886U JPH059808Y2 (enrdf_load_stackoverflow) 1986-07-25 1986-07-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11408886U JPH059808Y2 (enrdf_load_stackoverflow) 1986-07-25 1986-07-25

Publications (2)

Publication Number Publication Date
JPS6320354U true JPS6320354U (enrdf_load_stackoverflow) 1988-02-10
JPH059808Y2 JPH059808Y2 (enrdf_load_stackoverflow) 1993-03-10

Family

ID=30996501

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11408886U Expired - Lifetime JPH059808Y2 (enrdf_load_stackoverflow) 1986-07-25 1986-07-25

Country Status (1)

Country Link
JP (1) JPH059808Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH059808Y2 (enrdf_load_stackoverflow) 1993-03-10

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