JPH059808Y2 - - Google Patents

Info

Publication number
JPH059808Y2
JPH059808Y2 JP11408886U JP11408886U JPH059808Y2 JP H059808 Y2 JPH059808 Y2 JP H059808Y2 JP 11408886 U JP11408886 U JP 11408886U JP 11408886 U JP11408886 U JP 11408886U JP H059808 Y2 JPH059808 Y2 JP H059808Y2
Authority
JP
Japan
Prior art keywords
detector
lens
sample
electrode
secondary electrons
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP11408886U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6320354U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11408886U priority Critical patent/JPH059808Y2/ja
Publication of JPS6320354U publication Critical patent/JPS6320354U/ja
Application granted granted Critical
Publication of JPH059808Y2 publication Critical patent/JPH059808Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP11408886U 1986-07-25 1986-07-25 Expired - Lifetime JPH059808Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11408886U JPH059808Y2 (enrdf_load_stackoverflow) 1986-07-25 1986-07-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11408886U JPH059808Y2 (enrdf_load_stackoverflow) 1986-07-25 1986-07-25

Publications (2)

Publication Number Publication Date
JPS6320354U JPS6320354U (enrdf_load_stackoverflow) 1988-02-10
JPH059808Y2 true JPH059808Y2 (enrdf_load_stackoverflow) 1993-03-10

Family

ID=30996501

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11408886U Expired - Lifetime JPH059808Y2 (enrdf_load_stackoverflow) 1986-07-25 1986-07-25

Country Status (1)

Country Link
JP (1) JPH059808Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6320354U (enrdf_load_stackoverflow) 1988-02-10

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