JPS6320354U - - Google Patents
Info
- Publication number
- JPS6320354U JPS6320354U JP11408886U JP11408886U JPS6320354U JP S6320354 U JPS6320354 U JP S6320354U JP 11408886 U JP11408886 U JP 11408886U JP 11408886 U JP11408886 U JP 11408886U JP S6320354 U JPS6320354 U JP S6320354U
- Authority
- JP
- Japan
- Prior art keywords
- detector
- lens
- optical axis
- respect
- secondary electrons
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims 3
- 238000001514 detection method Methods 0.000 claims 2
- 230000005684 electric field Effects 0.000 claims 2
- 239000002245 particle Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 6
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
Description
第１図は本考案の一実施例を示すための図、第
２図は本考案の他の一実施例の要部を示すための
図、第３図は従来装置を示すための図、第４図は
測長対象を例示するための図、第５図は第１、第
２の二次電子検出器の出力信号を比較して示すた
めの図である。
１：偏向コイル、２：対物レンズ、３：試料、
４：第１の二次電子検出器、５：第２の二次電子
検出器、４ｐｓ，５ｐｓ：検出器電源、８，１６
：切換回路、９：加算回路、１０：ＣＲＴ、１１
：走査信号発生回路、１２：演算制御回路、１３
；カーソル位置入力器、１４，２０：電極、１５
：絶縁部材、１７，１８：可変電源、１９：チヤ
ンネルプレート型の第２の検出器、ＥＢ：電子線
、Ｙ：下側ヨーク。
Fig. 1 is a diagram showing one embodiment of the present invention, Fig. 2 is a diagram showing main parts of another embodiment of the invention, Fig. 3 is a diagram showing a conventional device, and Fig. 3 is a diagram showing a conventional device. FIG. 4 is a diagram for illustrating a length measurement object, and FIG. 5 is a diagram for comparing and illustrating output signals of the first and second secondary electron detectors. 1: Deflection coil, 2: Objective lens, 3: Sample,
4: First secondary electron detector, 5: Second secondary electron detector, 4 ps, 5 ps: Detector power supply, 8, 16
: switching circuit, 9: addition circuit, 10: CRT, 11
: Scanning signal generation circuit, 12: Arithmetic control circuit, 13
;Cursor position input device, 14, 20: Electrode, 15
: insulating member, 17, 18: variable power supply, 19: channel plate type second detector, EB: electron beam, Y: lower yoke.
Claims (1)
た荷電粒子線を試料上において走査する手段と、
陰影を強調した検出信号を得るための第１の検出
器と対称性の良い検出信号を得るための第２の検
出器を備え、該第１の検出器は前記試料とレンズ
との間に張り出した光軸に対して非対称な吸引電
界により二次電子を吸引して検出するための検出
器であり、前記第２の検出器は前記レンズ磁場に
よつて集束されてレンズ上段に導かれた二次電子
を検出するための検出器か又は前記レンズ下段に
光軸に対称に配置された検出器であり、前記第１
、第２の検出器を切換えて使用するようにした装
置において、前記レンズの下側ヨークによつて兼
ねられるか又は該下側ヨークの近傍に取り付けら
れた電極と、該電極に正又は負の電圧を切換えて
印加するための手段とを備えて成る荷電粒子線装
置。 an objective lens; means for scanning a charged particle beam focused by the objective lens over a sample;
A first detector for obtaining a detection signal with emphasis on shadows and a second detector for obtaining a detection signal with good symmetry, the first detector protruding between the sample and the lens. This is a detector for attracting and detecting secondary electrons using an attractive electric field that is asymmetric with respect to the optical axis, and the second detector is a detector for attracting and detecting secondary electrons using an attractive electric field that is asymmetric with respect to the optical axis. A detector for detecting secondary electrons or a detector arranged symmetrically with respect to the optical axis at the lower stage of the lens, and the first
, an apparatus in which the second detector is used by switching, an electrode which is also used by the lower yoke of the lens or is attached near the lower yoke, and a positive or negative A charged particle beam device comprising means for switching and applying voltage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11408886U JPH059808Y2 (en) | 1986-07-25 | 1986-07-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11408886U JPH059808Y2 (en) | 1986-07-25 | 1986-07-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6320354U true JPS6320354U (en) | 1988-02-10 |
| JPH059808Y2 JPH059808Y2 (en) | 1993-03-10 |
Family
ID=30996501
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11408886U Expired - Lifetime JPH059808Y2 (en) | 1986-07-25 | 1986-07-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH059808Y2 (en) |
-
1986
- 1986-07-25 JP JP11408886U patent/JPH059808Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH059808Y2 (en) | 1993-03-10 |
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