JPH0292657U - - Google Patents

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Publication number
JPH0292657U
JPH0292657U JP13089U JP13089U JPH0292657U JP H0292657 U JPH0292657 U JP H0292657U JP 13089 U JP13089 U JP 13089U JP 13089 U JP13089 U JP 13089U JP H0292657 U JPH0292657 U JP H0292657U
Authority
JP
Japan
Prior art keywords
electron beam
signal
primary electron
field emission
primary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13089U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13089U priority Critical patent/JPH0292657U/ja
Publication of JPH0292657U publication Critical patent/JPH0292657U/ja
Pending legal-status Critical Current

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  • Electron Sources, Ion Sources (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案の一実施例を示すブロツク図で
ある。 １……電界放射形電子銃、２……１次電子検出
手段、３……収束コイル、４……試料、５……２
次電子検出器、６……１次電子信号読取手段、７
……増幅回路、８……切換スイツチ、９……割算
回路、１０……像表示手段。 FIG. 1 is a block diagram showing one embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Field emission type electron gun, 2... Primary electron detection means, 3... Convergence coil, 4... Sample, 5...2
Primary electron detector, 6...Primary electron signal reading means, 7
. . . amplifier circuit, 8 . . . changeover switch, 9 . . . division circuit, 10 . . . image display means.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 電子線を発生させる手段が電界放射形であり、
その１次電子線の量を読み取る手段及び、１次電
子線を試料にあてた際に発生する反射電子、２次
電子等を、電気信号に変換し、１次電子線の信号
と割算する手段を有する走査形電子顕微または類
似装置において、１次電子線の信号が少ない場合
には、反射電子、２次電子信号を割算する値を１
次電子線信号のかわりに一定値に設定することを
特徴とする電界放射形電子顕微鏡の像表示装置。 The means for generating electron beams is field emission type.
A means for reading the amount of the primary electron beam, and converting reflected electrons, secondary electrons, etc. generated when the primary electron beam is applied to the sample into an electrical signal, and dividing the signal by the signal of the primary electron beam. In a scanning electron microscope or similar device that has a means for
An image display device for a field emission electron microscope, characterized in that a constant value is set instead of an electron beam signal.
JP13089U 1989-01-06 1989-01-06 Pending JPH0292657U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13089U JPH0292657U (en) 1989-01-06 1989-01-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13089U JPH0292657U (en) 1989-01-06 1989-01-06

Publications (1)

Publication Number Publication Date
JPH0292657U true JPH0292657U (en) 1990-07-23

Family

ID=31198884

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13089U Pending JPH0292657U (en) 1989-01-06 1989-01-06

Country Status (1)

Country Link
JP (1) JPH0292657U (en)

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