JPS63195722U - - Google Patents
Info
- Publication number
- JPS63195722U JPS63195722U JP8730587U JP8730587U JPS63195722U JP S63195722 U JPS63195722 U JP S63195722U JP 8730587 U JP8730587 U JP 8730587U JP 8730587 U JP8730587 U JP 8730587U JP S63195722 U JPS63195722 U JP S63195722U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- exhaust pipe
- support member
- core tube
- furnace core
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
Description
第１図は本考案に係る縦型熱処理装置の概略縦
断面図であり、第２図は従来の縦型熱処理装置の
概略縦断面図である。
１……縦型熱処理装置、２……炉芯管、３……
ヒータ部、４……ボート、５……ボート載置台、
６……マニホールド、７……排気管、８……トラ
ツプ、９……炉口、１０……ガス供給口、１１…
…基体、１８……排気口、２１……ドレイン。
FIG. 1 is a schematic longitudinal sectional view of a vertical heat treatment apparatus according to the present invention, and FIG. 2 is a schematic longitudinal sectional view of a conventional vertical heat treatment apparatus. 1... Vertical heat treatment equipment, 2... Furnace core tube, 3...
Heater section, 4...Boat, 5...Boat mounting stand,
6... Manifold, 7... Exhaust pipe, 8... Trap, 9... Furnace mouth, 10... Gas supply port, 11...
... Base body, 18 ... Exhaust port, 21 ... Drain.
Claims (1)
形成されて縦方向に延在されると共に底部側が底
部支持部材に支持される炉芯管と、 該炉芯管内で縦方向に配列された複数の基体を
載置するボートと、 該ボートを上記炉芯管下部で支持するボート載
置台と、 上記底部支持部材に接続された排気管とを有し
、 上記排気管に水蒸気除去手段を接続してなる縦
型熱処理装置。[Claims for Utility Model Registration] A furnace core tube having a furnace opening formed at the bottom, a gas supply port formed at the top, extending in the vertical direction, and whose bottom side is supported by a bottom support member; a boat on which a plurality of substrates arranged vertically in the tube are placed; a boat mounting stand for supporting the boat at the bottom of the furnace core tube; and an exhaust pipe connected to the bottom support member; A vertical heat treatment device consisting of a water vapor removal means connected to the exhaust pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8730587U JPS63195722U (en) | 1987-06-05 | 1987-06-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8730587U JPS63195722U (en) | 1987-06-05 | 1987-06-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63195722U true JPS63195722U (en) | 1988-12-16 |
Family
ID=30944388
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8730587U Pending JPS63195722U (en) | 1987-06-05 | 1987-06-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63195722U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11233505A (en) * | 1998-02-13 | 1999-08-27 | Tokyo Electron Ltd | Exhaust apparatus |
-
1987
- 1987-06-05 JP JP8730587U patent/JPS63195722U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11233505A (en) * | 1998-02-13 | 1999-08-27 | Tokyo Electron Ltd | Exhaust apparatus |