JPS63192459U - - Google Patents

Info

Publication number
JPS63192459U
JPS63192459U JP8315387U JP8315387U JPS63192459U JP S63192459 U JPS63192459 U JP S63192459U JP 8315387 U JP8315387 U JP 8315387U JP 8315387 U JP8315387 U JP 8315387U JP S63192459 U JPS63192459 U JP S63192459U
Authority
JP
Japan
Prior art keywords
reaction tube
main body
vapor phase
front chamber
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8315387U
Other languages
Japanese (ja)
Other versions
JPH0512279Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987083153U priority Critical patent/JPH0512279Y2/ja
Publication of JPS63192459U publication Critical patent/JPS63192459U/ja
Application granted granted Critical
Publication of JPH0512279Y2 publication Critical patent/JPH0512279Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案装置の一実施例を示す断面図、
第２図はＳｉＣＶＤ装置の断面図である。 ２……ガス導入管、３……ガス排出管、７……
軸部材、８……保持台、８……フローチヤンネル
、２０……反応管、２０ａ……上蓋、２０ｂ……
本体、２１……前室。 FIG. 1 is a sectional view showing an embodiment of the device of the present invention;
FIG. 2 is a cross-sectional view of the SiCVD apparatus. 2...Gas introduction pipe, 3...Gas discharge pipe, 7...
Shaft member, 8...Holding stand, 8...Flow channel, 20...Reaction tube, 20a...Top lid, 20b...
Main body, 21...front chamber.

Claims (1)

【実用新案登録請求の範囲】 １ 頂部にガス導入管を有する上蓋と側部又は底
部にガス排出管を有する本体が着脱可能に構成さ
れてなる反応管と、該反応管の前記本体の上方に
連設し、かつ上蓋を内蔵した前室と、該反応管の
本体底部を貫通して上端に保持台を載置して反応
管と前室間を上下動する軸部材とからなることを
特徴とする気相成長装置。 ２ 反応管を構成する前記上蓋と本体とが該反応
管内面に付着する堆積物の付着位置より上で上下
に分割されてなることを特徴とする実用新案登録
請求の範囲第１項に記載の気相成長装置。[Claims for Utility Model Registration] 1. A reaction tube having a top cover with a gas inlet pipe at the top and a main body having a gas discharge pipe at the side or bottom, which are detachably configured; It is characterized by consisting of a front chamber that is arranged in series and has a built-in upper lid, and a shaft member that penetrates the bottom of the main body of the reaction tube and has a holding stand placed on the upper end to move up and down between the reaction tube and the front chamber. Vapor phase growth equipment. 2. The utility model according to claim 1, characterized in that the upper lid and main body constituting the reaction tube are divided into upper and lower parts above the position where deposits adhere to the inner surface of the reaction tube. Vapor phase growth equipment.
JP1987083153U 1987-05-29 1987-05-29 Expired - Lifetime JPH0512279Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987083153U JPH0512279Y2 (en) 1987-05-29 1987-05-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987083153U JPH0512279Y2 (en) 1987-05-29 1987-05-29

Publications (2)

Publication Number Publication Date
JPS63192459U true JPS63192459U (en) 1988-12-12
JPH0512279Y2 JPH0512279Y2 (en) 1993-03-29

Family

ID=30936481

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987083153U Expired - Lifetime JPH0512279Y2 (en) 1987-05-29 1987-05-29

Country Status (1)

Country Link
JP (1) JPH0512279Y2 (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6190856U (en) * 1984-11-20 1986-06-12

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6190856U (en) * 1984-11-20 1986-06-12

Also Published As

Publication number Publication date
JPH0512279Y2 (en) 1993-03-29

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