JPS6255560U - - Google Patents
Info
- Publication number
- JPS6255560U JPS6255560U JP14555785U JP14555785U JPS6255560U JP S6255560 U JPS6255560 U JP S6255560U JP 14555785 U JP14555785 U JP 14555785U JP 14555785 U JP14555785 U JP 14555785U JP S6255560 U JPS6255560 U JP S6255560U
- Authority
- JP
- Japan
- Prior art keywords
- exhaust
- exhaust port
- reaction chamber
- tubular member
- vapor phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001947 vapour-phase growth Methods 0.000 claims 2
- 230000007613 environmental effect Effects 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
Landscapes
- Chemical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Description
第１図は本考案の一実施例を示す部分拡大断面
図、第２図は第１図の上面図、第３図は従来装置
を示す概要断面図である。
３……反応室、８……排気口、９……排気管、
１１……管状部材、１４……環状空間。
FIG. 1 is a partially enlarged sectional view showing an embodiment of the present invention, FIG. 2 is a top view of FIG. 1, and FIG. 3 is a schematic sectional view showing a conventional device. 3...Reaction chamber, 8...Exhaust port, 9...Exhaust pipe,
11... Tubular member, 14... Annular space.
Claims (1)
気装置において、前記反応室の排気口部に、該排
気口部から前記排気管内へ向つて伸びる管状部材
を着脱可能に設け、前記管状部材の外周面と排気
口部の内面との間に反応室側を閉じた環境空間を
形成したことを特徴とする気相成長装置等におけ
る排気装置。 In an exhaust device in which an exhaust pipe is connected to a reaction chamber of a vapor phase growth apparatus, etc., a tubular member extending from the exhaust port toward the inside of the exhaust pipe is removably provided at the exhaust port of the reaction chamber, and the tubular member 1. An exhaust system for a vapor phase growth apparatus, etc., characterized in that an environmental space with a reaction chamber side closed is formed between the outer peripheral surface of the exhaust port and the inner surface of the exhaust port.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14555785U JPS6255560U (en) | 1985-09-24 | 1985-09-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14555785U JPS6255560U (en) | 1985-09-24 | 1985-09-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6255560U true JPS6255560U (en) | 1987-04-06 |
Family
ID=31057207
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14555785U Pending JPS6255560U (en) | 1985-09-24 | 1985-09-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6255560U (en) |
-
1985
- 1985-09-24 JP JP14555785U patent/JPS6255560U/ja active Pending