JPH0314166U - - Google Patents
Info
- Publication number
- JPH0314166U JPH0314166U JP7365889U JP7365889U JPH0314166U JP H0314166 U JPH0314166 U JP H0314166U JP 7365889 U JP7365889 U JP 7365889U JP 7365889 U JP7365889 U JP 7365889U JP H0314166 U JPH0314166 U JP H0314166U
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- solid raw
- carrier gas
- chamber
- gas introduction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002994 raw material Substances 0.000 claims description 21
- 239000007787 solid Substances 0.000 claims description 15
- 239000012159 carrier gas Substances 0.000 claims description 11
- 238000000859 sublimation Methods 0.000 claims description 4
- 230000008022 sublimation Effects 0.000 claims description 4
- 238000001947 vapour-phase growth Methods 0.000 claims 4
- 238000003780 insertion Methods 0.000 claims 1
- 230000037431 insertion Effects 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000005192 partition Methods 0.000 claims 1
Landscapes
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Description
第１図は本考案の一実施例に係る固形原料供給
装置の正面断面図、第２図は原料セルの拡大断面
図、第３図は固形原料の上に載置する重石兼用の
フイルタの平面図、第４図及び第５図は従来の固
形原料供給装置の正面断面図である。
１１……恒温槽、１２……固形原料収納容器、
１３……原料セル、１４……キヤリアガス導入室
、１５……昇華室、１６，１７……フイルタ、１
８……キヤリアガス導入管、１９……キヤリアガ
ス導出管、２０……ノズル、Ｇ……固形原料。
Figure 1 is a front sectional view of a solid raw material supply device according to an embodiment of the present invention, Figure 2 is an enlarged sectional view of a raw material cell, and Figure 3 is a plan view of a filter that also serves as a weight placed on top of the solid raw material. 4 and 5 are front sectional views of a conventional solid raw material supply device. 11... Constant temperature bath, 12... Solid raw material storage container,
13... Raw material cell, 14... Carrier gas introduction chamber, 15... Sublimation chamber, 16, 17... Filter, 1
8... Carrier gas inlet pipe, 19... Carrier gas outlet pipe, 20... Nozzle, G... Solid raw material.
Claims (1)
ガス導出管とが各々連設する固形原料収納容器を
配置してなる気相成長装置用の固形原料供給装置
において、前記固形原料収納容器内に、この内部
を上下に仕切る原料セルを着脱自在に係止して、
固形原料収納容器内にキヤリアガス導入室と昇華
室とを区画形成し、キヤリアガス導入室にキヤリ
アガス導入管を、昇華室にキヤリアガス導出管を
各々連設すると共に、前記原料セルを、固形原料
と、該固形原料を充填する筒体と、固形原料の上
下に配置したフイルタとで形成したことを特徴と
する気相成長装置用の固形原料供給装置。 (2) 前記キヤリアガス導入管は、キヤリアガス
導入室内に水平に挿入され、挿入部は、その端部
が密閉されていると共に原料セルに対向しない方
向のノズルが適宜数形成されていることを特徴と
する請求項１に記載の気相成長装置用の固形原料
供給装置。 (3) 前記原料セルの上側のフイルタは、重石を
兼ねたフイルタとして適宜の重量で形成すると共
に筒体内に上下移動可能に配設したことを特徴と
する請求項１または２記載の気相成長装置用の固
形原料供給装置。[Scope of Claim for Utility Model Registration] (1) In a solid raw material supply device for a vapor phase growth apparatus, which comprises a solid raw material storage container in which a carrier gas inlet pipe and a carrier gas outlet pipe are arranged in series in a constant temperature chamber, A raw material cell that partitions the interior into upper and lower parts is removably locked inside the solid raw material storage container.
A carrier gas introduction chamber and a sublimation chamber are divided into a solid raw material storage container, a carrier gas introduction pipe is connected to the carrier gas introduction chamber, and a carrier gas outlet pipe is connected to the sublimation chamber, and the raw material cell is connected to the solid raw material and the sublimation chamber. A solid raw material supply device for a vapor phase growth apparatus, characterized in that it is formed of a cylindrical body filled with a solid raw material and a filter placed above and below the solid raw material. (2) The carrier gas introduction pipe is inserted horizontally into the carrier gas introduction chamber, and the insertion part is characterized in that its end is sealed and an appropriate number of nozzles are formed in a direction not facing the raw material cell. The solid raw material supply device for a vapor phase growth apparatus according to claim 1. (3) The vapor phase growth method according to claim 1 or 2, wherein the filter on the upper side of the raw material cell is formed with an appropriate weight as a filter that also serves as a weight, and is arranged to be movable up and down within the cylinder. Solid raw material supply device for equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7365889U JPH0726364Y2 (en) | 1989-06-23 | 1989-06-23 | Solid material feeder for vapor phase growth equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7365889U JPH0726364Y2 (en) | 1989-06-23 | 1989-06-23 | Solid material feeder for vapor phase growth equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0314166U true JPH0314166U (en) | 1991-02-13 |
| JPH0726364Y2 JPH0726364Y2 (en) | 1995-06-14 |
Family
ID=31612668
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7365889U Expired - Fee Related JPH0726364Y2 (en) | 1989-06-23 | 1989-06-23 | Solid material feeder for vapor phase growth equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0726364Y2 (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001323374A (en) * | 2000-05-15 | 2001-11-22 | Asm Microchemistry Oy | Method and device for feeding vapor phase reactant into reaction chamber |
| JP2008101420A (en) * | 2006-10-20 | 2008-05-01 | Hidekazu Koyama | Mounting metal fitting for blindfold board, and its mounting method |
| JP2009127096A (en) * | 2007-11-26 | 2009-06-11 | Ube Ind Ltd | Feeder for solid organic metal compound |
| JP2009125703A (en) * | 2007-11-27 | 2009-06-11 | Taiyo Nippon Sanso Corp | Method and apparatus for supplying solid raw material |
| JP2012082527A (en) * | 2004-12-08 | 2012-04-26 | Rohm & Haas Electronic Materials Llc | Delivery device |
| WO2012120472A1 (en) * | 2011-03-08 | 2012-09-13 | L'air Liquide Societe, Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Supply apparatus and method of solid material gas |
| JP2015158015A (en) * | 2002-07-23 | 2015-09-03 | インテグリス・インコーポレーテッド | Vaporizer delivery ampule |
| JPWO2015145907A1 (en) * | 2014-03-27 | 2017-04-13 | 宇部興産株式会社 | Organometallic compound-containing gas supply device |
| CN116018426A (en) * | 2020-09-15 | 2023-04-25 | 东京毅力科创株式会社 | Raw material supply device and raw material supply method |
-
1989
- 1989-06-23 JP JP7365889U patent/JPH0726364Y2/en not_active Expired - Fee Related
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001323374A (en) * | 2000-05-15 | 2001-11-22 | Asm Microchemistry Oy | Method and device for feeding vapor phase reactant into reaction chamber |
| JP2015158015A (en) * | 2002-07-23 | 2015-09-03 | インテグリス・インコーポレーテッド | Vaporizer delivery ampule |
| US10465286B2 (en) | 2002-07-23 | 2019-11-05 | Entegris, Inc. | Method and apparatus to help promote contact of gas with vaporized material |
| JP2012082527A (en) * | 2004-12-08 | 2012-04-26 | Rohm & Haas Electronic Materials Llc | Delivery device |
| JP2008101420A (en) * | 2006-10-20 | 2008-05-01 | Hidekazu Koyama | Mounting metal fitting for blindfold board, and its mounting method |
| JP2009127096A (en) * | 2007-11-26 | 2009-06-11 | Ube Ind Ltd | Feeder for solid organic metal compound |
| JP2009125703A (en) * | 2007-11-27 | 2009-06-11 | Taiyo Nippon Sanso Corp | Method and apparatus for supplying solid raw material |
| WO2012120472A1 (en) * | 2011-03-08 | 2012-09-13 | L'air Liquide Societe, Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Supply apparatus and method of solid material gas |
| JPWO2015145907A1 (en) * | 2014-03-27 | 2017-04-13 | 宇部興産株式会社 | Organometallic compound-containing gas supply device |
| CN116018426A (en) * | 2020-09-15 | 2023-04-25 | 东京毅力科创株式会社 | Raw material supply device and raw material supply method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0726364Y2 (en) | 1995-06-14 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |