JPH0267636U - - Google Patents
Info
- Publication number
- JPH0267636U JPH0267636U JP14637788U JP14637788U JPH0267636U JP H0267636 U JPH0267636 U JP H0267636U JP 14637788 U JP14637788 U JP 14637788U JP 14637788 U JP14637788 U JP 14637788U JP H0267636 U JPH0267636 U JP H0267636U
- Authority
- JP
- Japan
- Prior art keywords
- casing
- processing liquid
- air
- liquid tank
- introduction opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 11
- 238000012545 processing Methods 0.000 claims description 11
- 239000000126 substance Substances 0.000 claims description 3
- 238000012993 chemical processing Methods 0.000 claims 1
Landscapes
- Weting (AREA)
Description
第１図は本考案に係る薬液処理装置の実施例を
示す側断面図である。第２図は従来の薬液処理装
置の側断面図である。
１……処理液槽、１ａ……上面開口部、２……
処理液、７′……ケーシング、１４′……エア導
入用開口部、１０′……排気口、２１〜２４……
整流面。
FIG. 1 is a side sectional view showing an embodiment of a chemical liquid processing apparatus according to the present invention. FIG. 2 is a side sectional view of a conventional chemical liquid processing apparatus. 1... Processing liquid tank, 1a... Top opening, 2...
Processing liquid, 7'...Casing, 14'...Air introduction opening, 10'...Exhaust port, 21-24...
Rectifying surface.
Claims (1)
た処理液槽と、処理液槽を包囲して配設し、かつ
、上面に、処理液槽の上面開口部と対向して内向
へ向かつて階段状に拡開するエア導入用開口部を
有し、一側面に排気口を有するケーシングを具備
し、上記ケーシングのエア導入用開口部からエア
を導入し、そのエア流により、処理液槽の処理液
から蒸発したケーシング内の蒸気を排気口から排
出するようにした薬液処理装置において、 上記ケーシングのエア導入用開口部の内側面に
曲面形状の整流面を形成したことを特徴とする薬
液処理装置。[Claims for Utility Model Registration] A processing liquid tank that is supplied with a desired processing liquid and has an open top, and a processing liquid tank that is disposed surrounding the processing liquid tank and that has an upper opening on the top surface. The casing has an air introduction opening that opens inward in a stepwise manner facing the casing, and has an exhaust port on one side, and air is introduced from the air introduction opening of the casing, and the air is introduced into the casing. In a chemical processing device in which steam inside the casing evaporated from the processing liquid in the processing liquid tank is discharged from the exhaust port using an air flow, a curved rectifying surface is formed on the inner surface of the air introduction opening of the casing. A chemical liquid processing device characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14637788U JPH0267636U (en) | 1988-11-08 | 1988-11-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14637788U JPH0267636U (en) | 1988-11-08 | 1988-11-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0267636U true JPH0267636U (en) | 1990-05-22 |
Family
ID=31415810
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14637788U Pending JPH0267636U (en) | 1988-11-08 | 1988-11-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0267636U (en) |
-
1988
- 1988-11-08 JP JP14637788U patent/JPH0267636U/ja active Pending