JPS6211170U - - Google Patents
Info
- Publication number
- JPS6211170U JPS6211170U JP9833185U JP9833185U JPS6211170U JP S6211170 U JPS6211170 U JP S6211170U JP 9833185 U JP9833185 U JP 9833185U JP 9833185 U JP9833185 U JP 9833185U JP S6211170 U JPS6211170 U JP S6211170U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum container
- metal vapor
- lower vacuum
- passage
- rising
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 5
- 230000008020 evaporation Effects 0.000 claims description 2
- 238000001704 evaporation Methods 0.000 claims description 2
- 238000011084 recovery Methods 0.000 claims 2
- 230000000630 rising effect Effects 0.000 claims 2
- 238000001883 metal evaporation Methods 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は本考案の好適一実施例を示す斜視図、
第２図は同断面図、第３図は本考案の要部を示す
斜視図である。
尚、図中、１は下部真空容器、２は蒸発炉、９
は回収部、１０は上部真空容器、１６はコリメー
タ、ｍは金属蒸気である。
FIG. 1 is a perspective view showing a preferred embodiment of the present invention;
FIG. 2 is a sectional view of the same, and FIG. 3 is a perspective view showing the main parts of the present invention. In the figure, 1 is the lower vacuum vessel, 2 is the evaporation furnace, and 9
10 is an upper vacuum vessel, 16 is a collimator, and m is a metal vapor.
Claims (1)
に収容する下部真空容器と、該下部真空容器の上
方に設けられ、これより供給される金属蒸気を回
収する回収部を有する上部真空容器と、該上部真
空容器と下部真空容器とを結び、上記上昇する金
属蒸気を案内する通路に設けられ上昇する金属蒸
気を整流すると共に通路を開閉するコリメータと
を備えたことを特徴とする金属蒸発回収装置。 a lower vacuum container that houses an evaporation furnace that generates and ascends metal vapor; an upper vacuum container that is provided above the lower vacuum container and has a recovery section that recovers the metal vapor supplied from the lower vacuum container; A metal evaporation recovery device comprising a collimator that connects an upper vacuum container and a lower vacuum container and is provided in a passage that guides the rising metal vapor to rectify the rising metal vapor and to open and close the passage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9833185U JPS6211170U (en) | 1985-06-29 | 1985-06-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9833185U JPS6211170U (en) | 1985-06-29 | 1985-06-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6211170U true JPS6211170U (en) | 1987-01-23 |
Family
ID=30966163
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9833185U Pending JPS6211170U (en) | 1985-06-29 | 1985-06-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6211170U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008032666A1 (en) * | 2006-09-14 | 2008-03-20 | Ulvac, Inc. | Vacuum evaporation processing equipment |
-
1985
- 1985-06-29 JP JP9833185U patent/JPS6211170U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008032666A1 (en) * | 2006-09-14 | 2008-03-20 | Ulvac, Inc. | Vacuum evaporation processing equipment |
| JPWO2008032666A1 (en) * | 2006-09-14 | 2010-01-28 | 株式会社アルバック | Vacuum steam processing equipment |