JPH0476032U - - Google Patents
Info
- Publication number
- JPH0476032U JPH0476032U JP11993690U JP11993690U JPH0476032U JP H0476032 U JPH0476032 U JP H0476032U JP 11993690 U JP11993690 U JP 11993690U JP 11993690 U JP11993690 U JP 11993690U JP H0476032 U JPH0476032 U JP H0476032U
- Authority
- JP
- Japan
- Prior art keywords
- heat
- storage space
- wafer support
- cylinder
- insulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 5
- 238000009413 insulation Methods 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 238000009423 ventilation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Description
第１図及び第４図は本考案の実施例に係る縦型
構造の熱処理装置の要部構成を示す要部正面断面
図、第２図及び第３図は従来公知の熱処理装置を
示す正面断面図である。
３……ウエーハ支持ボート、３１……石英ガラ
ス塑成体、５０……保温筒、４０……保温台、Ｂ
……保温筒収納空間、Ａ……ウエーハ支持ボート
収納空間、７０……基台、２……炉芯管。
1 and 4 are front cross-sectional views of main parts showing the configuration of main parts of a vertically structured heat treatment apparatus according to an embodiment of the present invention, and FIGS. 2 and 3 are front cross-sectional views showing a conventionally known heat treatment apparatus. It is a diagram. 3... Wafer support boat, 31... Quartz glass plastic body, 50... Heat retention cylinder, 40... Heat retention stand, B
...Heat insulation tube storage space, A...Wafer support boat storage space, 70...Base, 2...Furnace core tube.
Claims (1)
間に内部に多数の微小空間を有する石英ガラス塑
成体からなる保温筒を収納した保温台を有し、該
保温台を介して前期保温筒収納空間とウエーハ支
持ボート収納空間を気密的に区分けするとともに
、下側より前記保温台を支持する基台若しくは該
基台との間の接触部を介して前記保温筒収納空間
を通気又は減圧可能に構成した事を特徴とする縦
型熱処理装置。 ２ 前記一の保温筒と保温台を夫々炉芯管に対し
同心状に配置するとともに、前記保温筒上面側で
前記保温台のウエーハ支持部背面側を支持可能に
構成した請求項１）記載の縦型熱処理装置。[Scope of Claim for Utility Model Registration] 1. A heat-retaining table having a wafer support boat disposed on the upper surface and a heat-retaining cylinder made of a quartz glass plastic body having a number of small spaces inside stored in the lower space, the heat-retaining stand The storage space for the first heat insulation cylinder and the storage space for the wafer support boat are airtightly separated through the storage space, and the storage space for the insulation cylinder is airtightly separated from the storage space for the wafer support boat through the base that supports the insulation table from below or the contact portion between the base and the base. A vertical heat treatment device characterized by a space configured to allow ventilation or depressurization. 2. The heating system according to claim 1), wherein the first heat-insulating cylinder and the heat-insulating table are respectively arranged concentrically with respect to the furnace core tube, and the back side of the wafer support part of the heat-insulating stand can be supported on the upper surface side of the heat-insulating cylinder. Vertical heat treatment equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11993690U JP2502929Y2 (en) | 1990-11-16 | 1990-11-16 | Vertical heat treatment device with heat insulation cylinder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11993690U JP2502929Y2 (en) | 1990-11-16 | 1990-11-16 | Vertical heat treatment device with heat insulation cylinder |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0476032U true JPH0476032U (en) | 1992-07-02 |
| JP2502929Y2 JP2502929Y2 (en) | 1996-06-26 |
Family
ID=31867866
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11993690U Expired - Lifetime JP2502929Y2 (en) | 1990-11-16 | 1990-11-16 | Vertical heat treatment device with heat insulation cylinder |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2502929Y2 (en) |
-
1990
- 1990-11-16 JP JP11993690U patent/JP2502929Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JP2502929Y2 (en) | 1996-06-26 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R323117 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| EXPY | Cancellation because of completion of term |