JPS63200331U - - Google Patents
Info
- Publication number
- JPS63200331U JPS63200331U JP9090487U JP9090487U JPS63200331U JP S63200331 U JPS63200331 U JP S63200331U JP 9090487 U JP9090487 U JP 9090487U JP 9090487 U JP9090487 U JP 9090487U JP S63200331 U JPS63200331 U JP S63200331U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- support member
- furnace
- bottom support
- furnace core
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims 1
Description
第１図は本考案に係る縦型熱処理装置の概略縦
断面図であり、第２図はその要部縦断面図である
。第３図は従来の縦型熱処理装置の概略縦断面図
である。
１…縦型熱処理装置、２…炉芯管、３…ヒータ
部、４…ボート、５…ボート載置台、６…マニホ
ールド、７…炉口、８…ガス供給口、１１…支持
部、１３…空間部、１９…排気口、２０…ドレイ
ン。
FIG. 1 is a schematic vertical cross-sectional view of a vertical heat treatment apparatus according to the present invention, and FIG. 2 is a vertical cross-sectional view of the main parts thereof. FIG. 3 is a schematic longitudinal sectional view of a conventional vertical heat treatment apparatus. DESCRIPTION OF SYMBOLS 1... Vertical heat treatment apparatus, 2... Furnace core tube, 3... Heater part, 4... Boat, 5... Boat mounting stand, 6... Manifold, 7... Furnace mouth, 8... Gas supply port, 11... Support part, 13... Space part, 19...exhaust port, 20...drain.
Claims (1)
形成されて縦方向に延在されると共に底部側が底
部支持部材に支持される炉芯管と、該炉芯管内で
縦方向に亘つて順次配列される複数の基体を載置
するボートと、該ボートを上記炉芯管下部で支持
するボート載置台と、上記底部支持部材に設けら
れた排気口とを有し、 上記底部支持部材とボート載置台との間の空間
部におけるガス流出方向に垂直な断面積が、上記
排気口のガス流出方向に垂直な断面積よりも小面
積であることを特徴とする縦型熱処理装置。[Claims for Utility Model Registration] A furnace core tube having a furnace opening formed at the bottom, a gas supply port formed at the top, extending in the vertical direction, and whose bottom side is supported by a bottom support member, and the furnace core. The furnace includes a boat on which a plurality of substrates are placed sequentially arranged in the vertical direction within the tube, a boat mounting table that supports the boat at the lower part of the furnace core tube, and an exhaust port provided in the bottom support member. and a cross-sectional area perpendicular to the gas outflow direction of the space between the bottom support member and the boat platform is smaller than a cross-sectional area of the exhaust port perpendicular to the gas outflow direction. Vertical heat treatment equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9090487U JPS63200331U (en) | 1987-06-13 | 1987-06-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9090487U JPS63200331U (en) | 1987-06-13 | 1987-06-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63200331U true JPS63200331U (en) | 1988-12-23 |
Family
ID=30951204
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9090487U Pending JPS63200331U (en) | 1987-06-13 | 1987-06-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63200331U (en) |
-
1987
- 1987-06-13 JP JP9090487U patent/JPS63200331U/ja active Pending