JPS63200328U - - Google Patents
Info
- Publication number
- JPS63200328U JPS63200328U JP8971287U JP8971287U JPS63200328U JP S63200328 U JPS63200328 U JP S63200328U JP 8971287 U JP8971287 U JP 8971287U JP 8971287 U JP8971287 U JP 8971287U JP S63200328 U JPS63200328 U JP S63200328U
- Authority
- JP
- Japan
- Prior art keywords
- furnace core
- core tube
- gas
- furnace
- tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Description
第１図は本考案の縦型熱処理装置の一例を示す
斜視図、第２図は従来の縦型熱処理装置の模式図
である。
１……縦型熱処理装置、２……炉芯管、３……
加熱手段、４……ガス供給管、５……炉芯管ガス
供給口、６……ガス導入口、７……基台、８……
ボート、９……基板。
FIG. 1 is a perspective view showing an example of a vertical heat treatment apparatus of the present invention, and FIG. 2 is a schematic diagram of a conventional vertical heat treatment apparatus. 1... Vertical heat treatment equipment, 2... Furnace core tube, 3...
Heating means, 4... Gas supply pipe, 5... Furnace tube gas supply port, 6... Gas inlet, 7... Base, 8...
Boat, 9... board.
Claims (1)
された炉口からその内部に挿入される炉芯管と、
その炉芯管の外周囲に該炉芯管を加熱するための
加熱手段を有するものであつて、 上記炉芯管には、その下部にガスを導入するた
めのガス導入口が配設されると共に当該炉芯管の
上部に当該炉芯管内にガスを供給する炉芯管ガス
供給口が配設され、上記ガス導入口と上記炉芯管
ガス供給口を接続するガス供給管が上記炉芯管の
壁面に沿つて配設されることを特徴とする縦型熱
処理装置。[Scope of Claim for Utility Model Registration] A furnace core tube into which a boat on which a plurality of substrates are placed is inserted through a furnace opening formed at the bottom;
A heating means is provided around the outer periphery of the furnace core tube for heating the furnace core tube, and the furnace core tube is provided with a gas inlet for introducing gas into the lower part of the furnace core tube. At the same time, a furnace core tube gas supply port for supplying gas into the furnace core tube is provided at the upper part of the furnace core tube, and a gas supply tube connecting the gas inlet and the furnace core gas supply port is connected to the furnace core. A vertical heat treatment device characterized by being installed along the wall of a pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8971287U JPS63200328U (en) | 1987-06-12 | 1987-06-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8971287U JPS63200328U (en) | 1987-06-12 | 1987-06-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63200328U true JPS63200328U (en) | 1988-12-23 |
Family
ID=30948936
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8971287U Pending JPS63200328U (en) | 1987-06-12 | 1987-06-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63200328U (en) |
-
1987
- 1987-06-12 JP JP8971287U patent/JPS63200328U/ja active Pending
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