JPH02120830U - - Google Patents
Info
- Publication number
- JPH02120830U JPH02120830U JP2959289U JP2959289U JPH02120830U JP H02120830 U JPH02120830 U JP H02120830U JP 2959289 U JP2959289 U JP 2959289U JP 2959289 U JP2959289 U JP 2959289U JP H02120830 U JPH02120830 U JP H02120830U
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- cooling device
- inert gas
- core tube
- furnace core
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 4
- 238000001816 cooling Methods 0.000 claims description 2
- 239000011261 inert gas Substances 0.000 claims description 2
- 239000007921 spray Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 description 3
- 238000007664 blowing Methods 0.000 description 1
Description
第１図はこの考案の一実施例の熱処理装置の断
面図である。第２図は従来の熱処理装置の断面図
である。
３……炉体に装着された炉芯管、４……ウエハ
ース熱処理用ボート、５……ウエハース、８……
円筒上の冷却装置、８ａ……不活性ガス導入口、
８ｂ……上部室、８ｃ……ガス吹き出しノズル、
８ｄ……ガス吸入ノズル、８ｅ……下部室、８ｆ
……ガス排出口。
FIG. 1 is a sectional view of a heat treatment apparatus according to an embodiment of this invention. FIG. 2 is a sectional view of a conventional heat treatment apparatus. 3... Furnace core tube attached to the furnace body, 4... Boat for wafer heat treatment, 5... Wafer, 8...
Cooling device on cylinder, 8a...Inert gas inlet,
8b... upper chamber, 8c... gas blowing nozzle,
8d...Gas suction nozzle, 8e...Lower chamber, 8f
...Gas exhaust port.
Claims (1)
性ガスをウエハース面と平行に吹き付ける冷却装
置を有する熱処理装置。 A heat treatment equipment that has a cooling device that sprays inert gas set at a constant temperature parallel to the wafer surface in front of the opening of the furnace core tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2959289U JPH02120830U (en) | 1989-03-14 | 1989-03-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2959289U JPH02120830U (en) | 1989-03-14 | 1989-03-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02120830U true JPH02120830U (en) | 1990-09-28 |
Family
ID=31253939
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2959289U Pending JPH02120830U (en) | 1989-03-14 | 1989-03-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02120830U (en) |
-
1989
- 1989-03-14 JP JP2959289U patent/JPH02120830U/ja active Pending