JPS63193831U - - Google Patents

Info

Publication number
JPS63193831U
JPS63193831U JP8497187U JP8497187U JPS63193831U JP S63193831 U JPS63193831 U JP S63193831U JP 8497187 U JP8497187 U JP 8497187U JP 8497187 U JP8497187 U JP 8497187U JP S63193831 U JPS63193831 U JP S63193831U
Authority
JP
Japan
Prior art keywords
reaction chamber
shielding cover
atmosphere shielding
epitaxial growth
atmosphere
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8497187U
Other languages
English (en)
Other versions
JPH0539629Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8497187U priority Critical patent/JPH0539629Y2/ja
Publication of JPS63193831U publication Critical patent/JPS63193831U/ja
Application granted granted Critical
Publication of JPH0539629Y2 publication Critical patent/JPH0539629Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図ａは本考案装置の第１実施例の成長途中
の状態または成長終了直後の状態を示す断面図、
第１図ｂは同じく第１実施例においてウエハを取
り出すまたは挿入する場合の状態を示す断面図、
第２図ａは本考案装置の第２実施例の成長途中の
状態または成長終了直後の状態を示す断面図、第
２図ｂは同じく第２実施例においてウエハを取り
出すまたは挿入する場合の状態を示す断面図、第
３図は従来装置の一例の成長終了直後の状態を示
す断面図である。 ５……ウエハ、８……大気遮断カバー、９……
出入扉、１３……反応室、１４……反応室可動部
。

Claims (1)

  1. 【実用新案登録請求の範囲】 (1) 反応室の外部に、反応室の直径よりも僅か
    に大きく、反応室可動部との隙間が小さい大気遮
    断カバーを設け、この大気遮断カバーの一部には
    ウエハを出入するための出入扉を設けてなるエピ
    タキシヤル成長装置。 (2) 大気遮断カバーの一部を透明な材料で構成
    した実用新案登録請求の範囲第１項記載のエピタ
    キシヤル成長装置。
JP8497187U 1987-05-29 1987-05-29 Expired - Lifetime JPH0539629Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8497187U JPH0539629Y2 (ja) 1987-05-29 1987-05-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8497187U JPH0539629Y2 (ja) 1987-05-29 1987-05-29

Publications (2)

Publication Number Publication Date
JPS63193831U true JPS63193831U (ja) 1988-12-14
JPH0539629Y2 JPH0539629Y2 (ja) 1993-10-07

Family

ID=30939948

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8497187U Expired - Lifetime JPH0539629Y2 (ja) 1987-05-29 1987-05-29

Country Status (1)

Country Link
JP (1) JPH0539629Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9415568B2 (en) 2010-02-15 2016-08-16 Productive Research Llc Formable light weight composite material systems and methods

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9415568B2 (en) 2010-02-15 2016-08-16 Productive Research Llc Formable light weight composite material systems and methods

Also Published As

Publication number Publication date
JPH0539629Y2 (ja) 1993-10-07

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