KR960012579B1 - Transistor & method of manufacturing the same - Google Patents
Transistor & method of manufacturing the same Download PDFInfo
- Publication number
- KR960012579B1 KR960012579B1 KR88006395A KR880006395A KR960012579B1 KR 960012579 B1 KR960012579 B1 KR 960012579B1 KR 88006395 A KR88006395 A KR 88006395A KR 880006395 A KR880006395 A KR 880006395A KR 960012579 B1 KR960012579 B1 KR 960012579B1
- Authority
- KR
- South Korea
- Prior art keywords
- transistor
- manufacturing
- emitter
- same
- base region
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 239000012535 impurity Substances 0.000 abstract 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 238000002347 injection Methods 0.000 abstract 1
- 239000007924 injection Substances 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Bipolar Transistors (AREA)
Abstract
The method of manufacturing transistor comprises the steps of : taper etching of an oxide silicon layer(3) formed on a base region(2); and diffusing an emitter impurity injected by ion-injection of emitter impurity to the base region(2). The transistor increases the effective area of the emitter for high integrity.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR88006395A KR960012579B1 (en) | 1988-05-31 | 1988-05-31 | Transistor & method of manufacturing the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR88006395A KR960012579B1 (en) | 1988-05-31 | 1988-05-31 | Transistor & method of manufacturing the same |
Publications (2)
Publication Number | Publication Date |
---|---|
KR890017812A KR890017812A (en) | 1989-12-18 |
KR960012579B1 true KR960012579B1 (en) | 1996-09-23 |
Family
ID=19274775
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR88006395A KR960012579B1 (en) | 1988-05-31 | 1988-05-31 | Transistor & method of manufacturing the same |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR960012579B1 (en) |
-
1988
- 1988-05-31 KR KR88006395A patent/KR960012579B1/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR890017812A (en) | 1989-12-18 |
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Legal Events
Date | Code | Title | Description |
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A201 | Request for examination | ||
G160 | Decision to publish patent application | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20100825 Year of fee payment: 15 |
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EXPY | Expiration of term |