JPS63151452U - - Google Patents

Info

Publication number
JPS63151452U
JPS63151452U JP4447687U JP4447687U JPS63151452U JP S63151452 U JPS63151452 U JP S63151452U JP 4447687 U JP4447687 U JP 4447687U JP 4447687 U JP4447687 U JP 4447687U JP S63151452 U JPS63151452 U JP S63151452U
Authority
JP
Japan
Prior art keywords
wafer carrier
wafer
drive shaft
vacuum chamber
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4447687U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4447687U priority Critical patent/JPS63151452U/ja
Publication of JPS63151452U publication Critical patent/JPS63151452U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Physical Vapour Deposition (AREA)
JP4447687U 1987-03-25 1987-03-25 Pending JPS63151452U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4447687U JPS63151452U (enExample) 1987-03-25 1987-03-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4447687U JPS63151452U (enExample) 1987-03-25 1987-03-25

Publications (1)

Publication Number Publication Date
JPS63151452U true JPS63151452U (enExample) 1988-10-05

Family

ID=30862325

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4447687U Pending JPS63151452U (enExample) 1987-03-25 1987-03-25

Country Status (1)

Country Link
JP (1) JPS63151452U (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001262375A (ja) * 2000-03-22 2001-09-26 Shibaura Mechatronics Corp ドライエッチング装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62259932A (ja) * 1986-05-06 1987-11-12 Japan Steel Works Ltd:The ウエハの搬入・搬出装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62259932A (ja) * 1986-05-06 1987-11-12 Japan Steel Works Ltd:The ウエハの搬入・搬出装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001262375A (ja) * 2000-03-22 2001-09-26 Shibaura Mechatronics Corp ドライエッチング装置

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