JPS63154665U - - Google Patents
Info
- Publication number
- JPS63154665U JPS63154665U JP1987048491U JP4849187U JPS63154665U JP S63154665 U JPS63154665 U JP S63154665U JP 1987048491 U JP1987048491 U JP 1987048491U JP 4849187 U JP4849187 U JP 4849187U JP S63154665 U JPS63154665 U JP S63154665U
- Authority
- JP
- Japan
- Prior art keywords
- film forming
- forming chamber
- substrate
- elevating table
- pedestal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987048491U JPH0630848Y2 (ja) | 1987-03-30 | 1987-03-30 | 基板受台の昇降装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987048491U JPH0630848Y2 (ja) | 1987-03-30 | 1987-03-30 | 基板受台の昇降装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63154665U true JPS63154665U (enExample) | 1988-10-11 |
| JPH0630848Y2 JPH0630848Y2 (ja) | 1994-08-17 |
Family
ID=30870069
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987048491U Expired - Lifetime JPH0630848Y2 (ja) | 1987-03-30 | 1987-03-30 | 基板受台の昇降装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0630848Y2 (enExample) |
-
1987
- 1987-03-30 JP JP1987048491U patent/JPH0630848Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0630848Y2 (ja) | 1994-08-17 |