JPS6315007Y2 - - Google Patents

Info

Publication number
JPS6315007Y2
JPS6315007Y2 JP1983194112U JP19411283U JPS6315007Y2 JP S6315007 Y2 JPS6315007 Y2 JP S6315007Y2 JP 1983194112 U JP1983194112 U JP 1983194112U JP 19411283 U JP19411283 U JP 19411283U JP S6315007 Y2 JPS6315007 Y2 JP S6315007Y2
Authority
JP
Japan
Prior art keywords
gear
surface plate
carrier
carrier gear
rotates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983194112U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60103648U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1983194112U priority Critical patent/JPS60103648U/ja
Publication of JPS60103648U publication Critical patent/JPS60103648U/ja
Application granted granted Critical
Publication of JPS6315007Y2 publication Critical patent/JPS6315007Y2/ja
Granted legal-status Critical Current

Links

JP1983194112U 1983-12-19 1983-12-19 両面ラツピング装置 Granted JPS60103648U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1983194112U JPS60103648U (ja) 1983-12-19 1983-12-19 両面ラツピング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1983194112U JPS60103648U (ja) 1983-12-19 1983-12-19 両面ラツピング装置

Publications (2)

Publication Number Publication Date
JPS60103648U JPS60103648U (ja) 1985-07-15
JPS6315007Y2 true JPS6315007Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-04-26

Family

ID=30417330

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1983194112U Granted JPS60103648U (ja) 1983-12-19 1983-12-19 両面ラツピング装置

Country Status (1)

Country Link
JP (1) JPS60103648U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6527624B1 (en) * 1999-03-26 2003-03-04 Applied Materials, Inc. Carrier head for providing a polishing slurry

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4157637A (en) * 1977-08-30 1979-06-12 Moskovskoe Vysshee Tekhnicheskoe Uchilische Imeni N.E. Baumana Planetary-type lapping machine for lapping a group of workpieces

Also Published As

Publication number Publication date
JPS60103648U (ja) 1985-07-15

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