JPS6314811B2 - - Google Patents

Info

Publication number
JPS6314811B2
JPS6314811B2 JP55079260A JP7926080A JPS6314811B2 JP S6314811 B2 JPS6314811 B2 JP S6314811B2 JP 55079260 A JP55079260 A JP 55079260A JP 7926080 A JP7926080 A JP 7926080A JP S6314811 B2 JPS6314811 B2 JP S6314811B2
Authority
JP
Japan
Prior art keywords
signal
supplied
scanning
quadrupole
astigmatism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55079260A
Other languages
English (en)
Japanese (ja)
Other versions
JPS574533A (en
Inventor
Takeshi Sato
Shunichi Suzaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NICHIDENSHI TECHNICS KK
Original Assignee
NICHIDENSHI TECHNICS KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NICHIDENSHI TECHNICS KK filed Critical NICHIDENSHI TECHNICS KK
Priority to JP7926080A priority Critical patent/JPS574533A/ja
Publication of JPS574533A publication Critical patent/JPS574533A/ja
Publication of JPS6314811B2 publication Critical patent/JPS6314811B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0228—Testing optical properties by measuring refractive power

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
JP7926080A 1980-06-12 1980-06-12 Detecting method of astigmatism Granted JPS574533A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7926080A JPS574533A (en) 1980-06-12 1980-06-12 Detecting method of astigmatism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7926080A JPS574533A (en) 1980-06-12 1980-06-12 Detecting method of astigmatism

Publications (2)

Publication Number Publication Date
JPS574533A JPS574533A (en) 1982-01-11
JPS6314811B2 true JPS6314811B2 (enrdf_load_stackoverflow) 1988-04-01

Family

ID=13684879

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7926080A Granted JPS574533A (en) 1980-06-12 1980-06-12 Detecting method of astigmatism

Country Status (1)

Country Link
JP (1) JPS574533A (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5811073B2 (ja) * 1975-08-01 1983-03-01 株式会社日立製作所 粒子線による試料走査形試料像表示装置
JPS5222225A (en) * 1975-08-12 1977-02-19 Honda Motor Co Ltd Front wheel suspension device for car

Also Published As

Publication number Publication date
JPS574533A (en) 1982-01-11

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