JPS6114631B2 - - Google Patents
Info
- Publication number
- JPS6114631B2 JPS6114631B2 JP55081134A JP8113480A JPS6114631B2 JP S6114631 B2 JPS6114631 B2 JP S6114631B2 JP 55081134 A JP55081134 A JP 55081134A JP 8113480 A JP8113480 A JP 8113480A JP S6114631 B2 JPS6114631 B2 JP S6114631B2
- Authority
- JP
- Japan
- Prior art keywords
- signal
- image
- scanning
- circuit
- objective lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005284 excitation Effects 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 5
- 238000012544 monitoring process Methods 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 239000000523 sample Substances 0.000 description 9
- 201000009310 astigmatism Diseases 0.000 description 5
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000010894 electron beam technology Methods 0.000 description 4
- 230000001360 synchronised effect Effects 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/21—Means for adjusting the focus
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8113480A JPS577058A (en) | 1980-06-16 | 1980-06-16 | Focus monitoring method for scan electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8113480A JPS577058A (en) | 1980-06-16 | 1980-06-16 | Focus monitoring method for scan electron microscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS577058A JPS577058A (en) | 1982-01-14 |
| JPS6114631B2 true JPS6114631B2 (enrdf_load_stackoverflow) | 1986-04-19 |
Family
ID=13737923
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8113480A Granted JPS577058A (en) | 1980-06-16 | 1980-06-16 | Focus monitoring method for scan electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS577058A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3751841B2 (ja) * | 2001-02-26 | 2006-03-01 | 株式会社日立製作所 | 電子線を用いた検査装置及び電子線を用いた検査方法 |
-
1980
- 1980-06-16 JP JP8113480A patent/JPS577058A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS577058A (en) | 1982-01-14 |