JPS6314504B2 - - Google Patents

Info

Publication number
JPS6314504B2
JPS6314504B2 JP56201842A JP20184281A JPS6314504B2 JP S6314504 B2 JPS6314504 B2 JP S6314504B2 JP 56201842 A JP56201842 A JP 56201842A JP 20184281 A JP20184281 A JP 20184281A JP S6314504 B2 JPS6314504 B2 JP S6314504B2
Authority
JP
Japan
Prior art keywords
channel region
region
gate insulating
insulating film
channel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56201842A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58102563A (ja
Inventor
Yutaka Hayashi
Yoshikazu Kojima
Masaaki Kamya
Kojiro Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Seiko Epson Corp filed Critical Agency of Industrial Science and Technology
Priority to JP56201842A priority Critical patent/JPS58102563A/ja
Publication of JPS58102563A publication Critical patent/JPS58102563A/ja
Publication of JPS6314504B2 publication Critical patent/JPS6314504B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/68Floating-gate IGFETs
    • H10D30/681Floating-gate IGFETs having only two programming levels
    • H10D30/684Floating-gate IGFETs having only two programming levels programmed by hot carrier injection
    • H10D30/685Floating-gate IGFETs having only two programming levels programmed by hot carrier injection from the channel

Landscapes

  • Semiconductor Memories (AREA)
  • Non-Volatile Memory (AREA)
JP56201842A 1981-12-15 1981-12-15 不揮発性半導体メモリ Granted JPS58102563A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56201842A JPS58102563A (ja) 1981-12-15 1981-12-15 不揮発性半導体メモリ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56201842A JPS58102563A (ja) 1981-12-15 1981-12-15 不揮発性半導体メモリ

Publications (2)

Publication Number Publication Date
JPS58102563A JPS58102563A (ja) 1983-06-18
JPS6314504B2 true JPS6314504B2 (en, 2012) 1988-03-31

Family

ID=16447792

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56201842A Granted JPS58102563A (ja) 1981-12-15 1981-12-15 不揮発性半導体メモリ

Country Status (1)

Country Link
JP (1) JPS58102563A (en, 2012)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60182776A (ja) * 1984-02-29 1985-09-18 Agency Of Ind Science & Technol 不揮発性半導体メモリ
JPS61131483A (ja) * 1984-11-29 1986-06-19 Res Dev Corp Of Japan 不揮発性メモリの書込み法
JPH0715973B2 (ja) * 1984-11-29 1995-02-22 新技術事業団 半導体不揮発性メモリ

Also Published As

Publication number Publication date
JPS58102563A (ja) 1983-06-18

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