JPS63142879A - 半導体レーザ及び半導体レーザの製造方法 - Google Patents
半導体レーザ及び半導体レーザの製造方法Info
- Publication number
- JPS63142879A JPS63142879A JP29026486A JP29026486A JPS63142879A JP S63142879 A JPS63142879 A JP S63142879A JP 29026486 A JP29026486 A JP 29026486A JP 29026486 A JP29026486 A JP 29026486A JP S63142879 A JPS63142879 A JP S63142879A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- waveguide
- semiconductor laser
- optical waveguide
- width
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims description 31
- 238000004519 manufacturing process Methods 0.000 title description 4
- 230000003287 optical effect Effects 0.000 claims description 20
- 150000001875 compounds Chemical class 0.000 claims description 16
- 238000002347 injection Methods 0.000 claims description 6
- 239000007924 injection Substances 0.000 claims description 6
- 238000000034 method Methods 0.000 description 24
- 230000010355 oscillation Effects 0.000 description 16
- 238000005530 etching Methods 0.000 description 9
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 8
- 201000009310 astigmatism Diseases 0.000 description 7
- 238000005253 cladding Methods 0.000 description 7
- 230000008569 process Effects 0.000 description 6
- 230000007246 mechanism Effects 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 230000000903 blocking effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000009412 basement excavation Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000010365 information processing Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 201000001880 Sexual dysfunction Diseases 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004401 flow injection analysis Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 125000002524 organometallic group Chemical group 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- 239000013585 weight reducing agent Substances 0.000 description 1
Landscapes
- Semiconductor Lasers (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29026486A JPS63142879A (ja) | 1986-12-05 | 1986-12-05 | 半導体レーザ及び半導体レーザの製造方法 |
| FR8714606A FR2606223B1 (fr) | 1986-10-29 | 1987-10-22 | Laser a semiconducteur et son procede de fabrication |
| US07/113,788 US4856013A (en) | 1986-10-29 | 1987-10-28 | Semiconductor laser having an active layer and cladding layer |
| DE19873736497 DE3736497A1 (de) | 1986-10-29 | 1987-10-28 | Halbleiterlaser und verfahren zu seiner herstellung |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29026486A JPS63142879A (ja) | 1986-12-05 | 1986-12-05 | 半導体レーザ及び半導体レーザの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63142879A true JPS63142879A (ja) | 1988-06-15 |
| JPH0569318B2 JPH0569318B2 (enrdf_load_stackoverflow) | 1993-09-30 |
Family
ID=17753887
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29026486A Granted JPS63142879A (ja) | 1986-10-29 | 1986-12-05 | 半導体レーザ及び半導体レーザの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63142879A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5375133A (en) * | 1991-03-28 | 1994-12-20 | Seiko Epson Corporation | Surface emitting semiconductor laser and method of manufacture |
| JPH10223966A (ja) * | 1997-01-31 | 1998-08-21 | Sharp Corp | 利得結合分布帰還型半導体レーザ装置 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57128092A (en) * | 1981-01-30 | 1982-08-09 | Sanyo Electric Co Ltd | Imbedded type semiconductor laser device |
| JPS6058695A (ja) * | 1983-09-12 | 1985-04-04 | Nec Corp | 埋め込み型半導体レ−ザ素子の製造方法 |
| JPS61144894A (ja) * | 1984-12-19 | 1986-07-02 | Sony Corp | 半導体レ−ザ−の製法 |
-
1986
- 1986-12-05 JP JP29026486A patent/JPS63142879A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57128092A (en) * | 1981-01-30 | 1982-08-09 | Sanyo Electric Co Ltd | Imbedded type semiconductor laser device |
| JPS6058695A (ja) * | 1983-09-12 | 1985-04-04 | Nec Corp | 埋め込み型半導体レ−ザ素子の製造方法 |
| JPS61144894A (ja) * | 1984-12-19 | 1986-07-02 | Sony Corp | 半導体レ−ザ−の製法 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5375133A (en) * | 1991-03-28 | 1994-12-20 | Seiko Epson Corporation | Surface emitting semiconductor laser and method of manufacture |
| JPH10223966A (ja) * | 1997-01-31 | 1998-08-21 | Sharp Corp | 利得結合分布帰還型半導体レーザ装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0569318B2 (enrdf_load_stackoverflow) | 1993-09-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |