JPS63141689A - 板状体の回転機構を有する昇降方法及びその装置 - Google Patents
板状体の回転機構を有する昇降方法及びその装置Info
- Publication number
- JPS63141689A JPS63141689A JP28676686A JP28676686A JPS63141689A JP S63141689 A JPS63141689 A JP S63141689A JP 28676686 A JP28676686 A JP 28676686A JP 28676686 A JP28676686 A JP 28676686A JP S63141689 A JPS63141689 A JP S63141689A
- Authority
- JP
- Japan
- Prior art keywords
- plate
- holding mechanism
- cleaning
- degrees
- shaped body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000007246 mechanism Effects 0.000 title claims description 116
- 238000000034 method Methods 0.000 title claims description 6
- 238000005096 rolling process Methods 0.000 title 1
- 230000003028 elevating effect Effects 0.000 claims description 9
- 238000004140 cleaning Methods 0.000 description 72
- 239000012530 fluid Substances 0.000 description 27
- 239000000758 substrate Substances 0.000 description 21
- 238000001816 cooling Methods 0.000 description 9
- 239000007788 liquid Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 4
- 230000001174 ascending effect Effects 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000013020 steam cleaning Methods 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning In General (AREA)
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28676686A JPS63141689A (ja) | 1986-12-03 | 1986-12-03 | 板状体の回転機構を有する昇降方法及びその装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28676686A JPS63141689A (ja) | 1986-12-03 | 1986-12-03 | 板状体の回転機構を有する昇降方法及びその装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63141689A true JPS63141689A (ja) | 1988-06-14 |
| JPH0439394B2 JPH0439394B2 (enrdf_load_stackoverflow) | 1992-06-29 |
Family
ID=17708768
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28676686A Granted JPS63141689A (ja) | 1986-12-03 | 1986-12-03 | 板状体の回転機構を有する昇降方法及びその装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63141689A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02219228A (ja) * | 1989-02-20 | 1990-08-31 | Tsurumi Kogyo Kk | 洗浄装置 |
| JPH0547728A (ja) * | 1991-08-13 | 1993-02-26 | Shin Etsu Handotai Co Ltd | ウエーハ起立方法及び装置 |
-
1986
- 1986-12-03 JP JP28676686A patent/JPS63141689A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02219228A (ja) * | 1989-02-20 | 1990-08-31 | Tsurumi Kogyo Kk | 洗浄装置 |
| JPH0547728A (ja) * | 1991-08-13 | 1993-02-26 | Shin Etsu Handotai Co Ltd | ウエーハ起立方法及び装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0439394B2 (enrdf_load_stackoverflow) | 1992-06-29 |
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