JPS6314066B2 - - Google Patents
Info
- Publication number
- JPS6314066B2 JPS6314066B2 JP16862282A JP16862282A JPS6314066B2 JP S6314066 B2 JPS6314066 B2 JP S6314066B2 JP 16862282 A JP16862282 A JP 16862282A JP 16862282 A JP16862282 A JP 16862282A JP S6314066 B2 JPS6314066 B2 JP S6314066B2
- Authority
- JP
- Japan
- Prior art keywords
- metal
- stamper
- layer
- thin film
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052751 metal Inorganic materials 0.000 claims description 61
- 239000002184 metal Substances 0.000 claims description 61
- 239000010408 film Substances 0.000 claims description 25
- 239000010409 thin film Substances 0.000 claims description 24
- 238000004519 manufacturing process Methods 0.000 claims description 20
- 235000012489 doughnuts Nutrition 0.000 claims description 19
- 238000004070 electrodeposition Methods 0.000 claims description 19
- 239000011521 glass Substances 0.000 claims description 19
- 238000006243 chemical reaction Methods 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 13
- 238000002844 melting Methods 0.000 claims description 12
- 229910052709 silver Inorganic materials 0.000 claims description 11
- 229910052737 gold Inorganic materials 0.000 claims description 9
- 230000008018 melting Effects 0.000 claims description 9
- 229910052763 palladium Inorganic materials 0.000 claims description 8
- 229910052697 platinum Inorganic materials 0.000 claims description 7
- 229910052703 rhodium Inorganic materials 0.000 claims description 6
- 229910052759 nickel Inorganic materials 0.000 claims description 5
- 229910001220 stainless steel Inorganic materials 0.000 claims description 5
- 239000010935 stainless steel Substances 0.000 claims description 5
- 229910001369 Brass Inorganic materials 0.000 claims description 3
- 229910000906 Bronze Inorganic materials 0.000 claims description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 3
- 239000010951 brass Substances 0.000 claims description 3
- 239000010974 bronze Substances 0.000 claims description 3
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 claims description 3
- 229910052742 iron Inorganic materials 0.000 claims description 3
- 238000007747 plating Methods 0.000 claims description 3
- 229910052804 chromium Inorganic materials 0.000 claims description 2
- 229910052741 iridium Inorganic materials 0.000 claims description 2
- 238000010030 laminating Methods 0.000 claims description 2
- 230000003578 releasing effect Effects 0.000 claims description 2
- 229910052715 tantalum Inorganic materials 0.000 claims description 2
- 229910052726 zirconium Inorganic materials 0.000 claims description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 53
- 239000010410 layer Substances 0.000 description 35
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 9
- 239000004332 silver Substances 0.000 description 9
- 229920002120 photoresistant polymer Polymers 0.000 description 8
- 239000011248 coating agent Substances 0.000 description 7
- 238000000576 coating method Methods 0.000 description 7
- 230000002265 prevention Effects 0.000 description 5
- 239000013078 crystal Substances 0.000 description 4
- 230000001678 irradiating effect Effects 0.000 description 4
- 230000007547 defect Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 239000011265 semifinished product Substances 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 230000002542 deteriorative effect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005546 reactive sputtering Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229920003002 synthetic resin Polymers 0.000 description 2
- 239000000057 synthetic resin Substances 0.000 description 2
- 229910021607 Silver chloride Inorganic materials 0.000 description 1
- 229910052946 acanthite Inorganic materials 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- DITXJPASYXFQAS-UHFFFAOYSA-N nickel;sulfamic acid Chemical compound [Ni].NS(O)(=O)=O DITXJPASYXFQAS-UHFFFAOYSA-N 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000010944 silver (metal) Substances 0.000 description 1
- HKZLPVFGJNLROG-UHFFFAOYSA-M silver monochloride Chemical compound [Cl-].[Ag+] HKZLPVFGJNLROG-UHFFFAOYSA-M 0.000 description 1
- XUARKZBEFFVFRG-UHFFFAOYSA-N silver sulfide Chemical compound [S-2].[Ag+].[Ag+] XUARKZBEFFVFRG-UHFFFAOYSA-N 0.000 description 1
- 229940056910 silver sulfide Drugs 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Landscapes
- Moulds For Moulding Plastics Or The Like (AREA)
- Manufacturing Optical Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16862282A JPS5959892A (ja) | 1982-09-29 | 1982-09-29 | スタンパ−の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16862282A JPS5959892A (ja) | 1982-09-29 | 1982-09-29 | スタンパ−の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5959892A JPS5959892A (ja) | 1984-04-05 |
| JPS6314066B2 true JPS6314066B2 (enrdf_load_stackoverflow) | 1988-03-29 |
Family
ID=15871468
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16862282A Granted JPS5959892A (ja) | 1982-09-29 | 1982-09-29 | スタンパ−の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5959892A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6369991A (ja) * | 1986-09-09 | 1988-03-30 | Nec Corp | 光学デイスク用スタンパの製造方法 |
-
1982
- 1982-09-29 JP JP16862282A patent/JPS5959892A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5959892A (ja) | 1984-04-05 |
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