JPS63135266U - - Google Patents
Info
- Publication number
- JPS63135266U JPS63135266U JP2754487U JP2754487U JPS63135266U JP S63135266 U JPS63135266 U JP S63135266U JP 2754487 U JP2754487 U JP 2754487U JP 2754487 U JP2754487 U JP 2754487U JP S63135266 U JPS63135266 U JP S63135266U
- Authority
- JP
- Japan
- Prior art keywords
- cylindrical object
- test object
- signal
- optical system
- inspection device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims 2
- 238000001514 detection method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000005286 illumination Methods 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2754487U JPS63135266U (da) | 1987-02-26 | 1987-02-26 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2754487U JPS63135266U (da) | 1987-02-26 | 1987-02-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63135266U true JPS63135266U (da) | 1988-09-05 |
Family
ID=30829680
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2754487U Pending JPS63135266U (da) | 1987-02-26 | 1987-02-26 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63135266U (da) |
-
1987
- 1987-02-26 JP JP2754487U patent/JPS63135266U/ja active Pending
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