JPS6313351B2 - - Google Patents

Info

Publication number
JPS6313351B2
JPS6313351B2 JP54114183A JP11418379A JPS6313351B2 JP S6313351 B2 JPS6313351 B2 JP S6313351B2 JP 54114183 A JP54114183 A JP 54114183A JP 11418379 A JP11418379 A JP 11418379A JP S6313351 B2 JPS6313351 B2 JP S6313351B2
Authority
JP
Japan
Prior art keywords
film
gate
oxide film
nitride film
silicon nitride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54114183A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5638866A (en
Inventor
Hideo Sunami
Yoshifumi Kawamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11418379A priority Critical patent/JPS5638866A/ja
Publication of JPS5638866A publication Critical patent/JPS5638866A/ja
Publication of JPS6313351B2 publication Critical patent/JPS6313351B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Non-Volatile Memory (AREA)
JP11418379A 1979-09-07 1979-09-07 Manufacture of semiconductor device Granted JPS5638866A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11418379A JPS5638866A (en) 1979-09-07 1979-09-07 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11418379A JPS5638866A (en) 1979-09-07 1979-09-07 Manufacture of semiconductor device

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP9976387A Division JPS62271450A (ja) 1987-04-24 1987-04-24 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5638866A JPS5638866A (en) 1981-04-14
JPS6313351B2 true JPS6313351B2 (https=) 1988-03-25

Family

ID=14631266

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11418379A Granted JPS5638866A (en) 1979-09-07 1979-09-07 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5638866A (https=)

Also Published As

Publication number Publication date
JPS5638866A (en) 1981-04-14

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