JPS63133048A - 表面検査装置の処理回路 - Google Patents
表面検査装置の処理回路Info
- Publication number
- JPS63133048A JPS63133048A JP27881686A JP27881686A JPS63133048A JP S63133048 A JPS63133048 A JP S63133048A JP 27881686 A JP27881686 A JP 27881686A JP 27881686 A JP27881686 A JP 27881686A JP S63133048 A JPS63133048 A JP S63133048A
- Authority
- JP
- Japan
- Prior art keywords
- signal
- binary
- lane
- circuit
- defect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007689 inspection Methods 0.000 title claims description 17
- 230000007547 defect Effects 0.000 claims abstract description 39
- 238000001514 detection method Methods 0.000 claims abstract description 18
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 claims abstract description 5
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 230000001360 synchronised effect Effects 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 3
- 230000002950 deficient Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27881686A JPS63133048A (ja) | 1986-11-25 | 1986-11-25 | 表面検査装置の処理回路 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27881686A JPS63133048A (ja) | 1986-11-25 | 1986-11-25 | 表面検査装置の処理回路 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63133048A true JPS63133048A (ja) | 1988-06-04 |
| JPH0562942B2 JPH0562942B2 (enrdf_load_stackoverflow) | 1993-09-09 |
Family
ID=17602553
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27881686A Granted JPS63133048A (ja) | 1986-11-25 | 1986-11-25 | 表面検査装置の処理回路 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63133048A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005290623A (ja) * | 2004-03-31 | 2005-10-20 | Arisawa Mfg Co Ltd | 開口率測定装置 |
| KR101294218B1 (ko) * | 2010-05-10 | 2013-08-07 | 동우 화인켐 주식회사 | 편광 필름 원반의 품질 판정 시스템 및 방법 |
-
1986
- 1986-11-25 JP JP27881686A patent/JPS63133048A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005290623A (ja) * | 2004-03-31 | 2005-10-20 | Arisawa Mfg Co Ltd | 開口率測定装置 |
| KR101294218B1 (ko) * | 2010-05-10 | 2013-08-07 | 동우 화인켐 주식회사 | 편광 필름 원반의 품질 판정 시스템 및 방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0562942B2 (enrdf_load_stackoverflow) | 1993-09-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |