JPS63129635A - バンプ付基板 - Google Patents
バンプ付基板Info
- Publication number
- JPS63129635A JPS63129635A JP61277488A JP27748886A JPS63129635A JP S63129635 A JPS63129635 A JP S63129635A JP 61277488 A JP61277488 A JP 61277488A JP 27748886 A JP27748886 A JP 27748886A JP S63129635 A JPS63129635 A JP S63129635A
- Authority
- JP
- Japan
- Prior art keywords
- bump
- plating
- roughness
- bonding
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007747 plating Methods 0.000 claims abstract description 24
- 230000003746 surface roughness Effects 0.000 claims abstract description 23
- 239000000758 substrate Substances 0.000 claims abstract description 17
- 229910052782 aluminium Inorganic materials 0.000 claims description 15
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 15
- 239000004065 semiconductor Substances 0.000 claims description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical group [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract description 6
- 239000011889 copper foil Substances 0.000 abstract description 6
- 239000000463 material Substances 0.000 abstract description 4
- 239000004020 conductor Substances 0.000 abstract description 3
- 238000009713 electroplating Methods 0.000 abstract 1
- 230000002093 peripheral effect Effects 0.000 abstract 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 12
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 8
- 229910052737 gold Inorganic materials 0.000 description 8
- 239000010931 gold Substances 0.000 description 8
- 229910052759 nickel Inorganic materials 0.000 description 6
- 229910000831 Steel Inorganic materials 0.000 description 5
- 239000010959 steel Substances 0.000 description 5
- 238000005530 etching Methods 0.000 description 4
- 239000011888 foil Substances 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- ROOXNKNUYICQNP-UHFFFAOYSA-N ammonium persulfate Chemical compound [NH4+].[NH4+].[O-]S(=O)(=O)OOS([O-])(=O)=O ROOXNKNUYICQNP-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- LCPVQAHEFVXVKT-UHFFFAOYSA-N 2-(2,4-difluorophenoxy)pyridin-3-amine Chemical compound NC1=CC=CN=C1OC1=CC=C(F)C=C1F LCPVQAHEFVXVKT-UHFFFAOYSA-N 0.000 description 1
- 208000025174 PANDAS Diseases 0.000 description 1
- 208000021155 Paediatric autoimmune neuropsychiatric disorders associated with streptococcal infection Diseases 0.000 description 1
- 240000000220 Panda oleosa Species 0.000 description 1
- 235000016496 Panda oleosa Nutrition 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910001870 ammonium persulfate Inorganic materials 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 150000003949 imides Chemical class 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- CHQMHPLRPQMAMX-UHFFFAOYSA-L sodium persulfate Substances [Na+].[Na+].[O-]S(=O)(=O)OOS([O-])(=O)=O CHQMHPLRPQMAMX-UHFFFAOYSA-L 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/495—Lead-frames or other flat leads
- H01L23/49541—Geometry of the lead-frame
- H01L23/49548—Cross section geometry
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/50—Tape automated bonding [TAB] connectors, i.e. film carriers; Manufacturing methods related thereto
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01013—Aluminum [Al]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01078—Platinum [Pt]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
Landscapes
- Physics & Mathematics (AREA)
- Geometry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Wire Bonding (AREA)
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61277488A JPS63129635A (ja) | 1986-11-20 | 1986-11-20 | バンプ付基板 |
US07/017,419 US4786545A (en) | 1986-02-28 | 1987-02-24 | Circuit substrate and method for forming bumps on the circuit substrate |
GB8704425A GB2187331B (en) | 1986-02-28 | 1987-02-25 | Method of forming an integrated circuit assembly or part thereof |
GB8901825A GB2211351B (en) | 1986-02-28 | 1989-01-27 | Method of forming an integrated circuit assembly or part thereof |
SG1392A SG1392G (en) | 1986-02-28 | 1992-01-08 | Method of forming an integrated circuit assembly or part thereof |
SG1492A SG1492G (en) | 1986-02-28 | 1992-01-08 | Method of forming an integrated circuit assembly or part thereof |
HK359/93A HK35993A (en) | 1986-02-28 | 1993-04-15 | Method of forming an integrated circuit assembly or part thereof |
HK360/93A HK36093A (en) | 1986-02-28 | 1993-04-15 | Method of forming an integrated circuit assembly or part thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61277488A JPS63129635A (ja) | 1986-11-20 | 1986-11-20 | バンプ付基板 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63129635A true JPS63129635A (ja) | 1988-06-02 |
JPH0478175B2 JPH0478175B2 (enrdf_load_stackoverflow) | 1992-12-10 |
Family
ID=17584292
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61277488A Granted JPS63129635A (ja) | 1986-02-28 | 1986-11-20 | バンプ付基板 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63129635A (enrdf_load_stackoverflow) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1997016848A1 (fr) * | 1995-10-31 | 1997-05-09 | Ibiden Co., Ltd. | Module de composant electronique et son procede de fabrication |
WO1999012197A1 (fr) * | 1997-08-29 | 1999-03-11 | Hitachi, Ltd. | Dispositif a semi-conducteurs colle par compression et convertisseur de courant faisant appel a ce dispositif |
EP1014445A1 (en) * | 1998-12-24 | 2000-06-28 | Shinko Electric Industries Co. Ltd. | Carrier substrate for producing semiconductor device |
JP2010087229A (ja) * | 2008-09-30 | 2010-04-15 | Sanyo Electric Co Ltd | 半導体モジュール、半導体モジュールの製造方法および携帯機器 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52124865A (en) * | 1976-04-13 | 1977-10-20 | Sharp Corp | Semiconductor device |
JPS55138864A (en) * | 1979-04-16 | 1980-10-30 | Sharp Corp | Method of fabricating semiconductor assembling substrate |
-
1986
- 1986-11-20 JP JP61277488A patent/JPS63129635A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52124865A (en) * | 1976-04-13 | 1977-10-20 | Sharp Corp | Semiconductor device |
JPS55138864A (en) * | 1979-04-16 | 1980-10-30 | Sharp Corp | Method of fabricating semiconductor assembling substrate |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1997016848A1 (fr) * | 1995-10-31 | 1997-05-09 | Ibiden Co., Ltd. | Module de composant electronique et son procede de fabrication |
WO1999012197A1 (fr) * | 1997-08-29 | 1999-03-11 | Hitachi, Ltd. | Dispositif a semi-conducteurs colle par compression et convertisseur de courant faisant appel a ce dispositif |
EP1014445A1 (en) * | 1998-12-24 | 2000-06-28 | Shinko Electric Industries Co. Ltd. | Carrier substrate for producing semiconductor device |
JP2010087229A (ja) * | 2008-09-30 | 2010-04-15 | Sanyo Electric Co Ltd | 半導体モジュール、半導体モジュールの製造方法および携帯機器 |
Also Published As
Publication number | Publication date |
---|---|
JPH0478175B2 (enrdf_load_stackoverflow) | 1992-12-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |