JPH01215047A - 半導体チップのバンプ形成方法 - Google Patents

半導体チップのバンプ形成方法

Info

Publication number
JPH01215047A
JPH01215047A JP63041321A JP4132188A JPH01215047A JP H01215047 A JPH01215047 A JP H01215047A JP 63041321 A JP63041321 A JP 63041321A JP 4132188 A JP4132188 A JP 4132188A JP H01215047 A JPH01215047 A JP H01215047A
Authority
JP
Japan
Prior art keywords
conductive material
bump
pad
semiconductor chip
piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP63041321A
Other languages
English (en)
Inventor
Osamu Sugiyama
修 杉山
Yoshiro Maki
牧　芳郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP63041321A priority Critical patent/JPH01215047A/ja
Publication of JPH01215047A publication Critical patent/JPH01215047A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/10—Bump connectors ; Manufacturing methods related thereto
    • H01L24/11—Manufacturing methods
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/11—Manufacturing methods
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/11—Manufacturing methods
    • H01L2224/113—Manufacturing methods by local deposition of the material of the bump connector
    • H01L2224/1133—Manufacturing methods by local deposition of the material of the bump connector in solid form
    • H01L2224/1134—Stud bumping, i.e. using a wire-bonding apparatus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
    • H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
    • H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
    • H01L2224/13001—Core members of the bump connector
    • H01L2224/1301—Shape
    • H01L2224/13016—Shape in side view
    • H01L2224/13017—Shape in side view being non uniform along the bump connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
    • H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
    • H01L2224/13001—Core members of the bump connector
    • H01L2224/13075—Plural core members
    • H01L2224/13076—Plural core members being mutually engaged together, e.g. through inserts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
    • H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
    • H01L2224/13001—Core members of the bump connector
    • H01L2224/13099—Material
    • H01L2224/131—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
    • H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
    • H01L2224/13001—Core members of the bump connector
    • H01L2224/13099—Material
    • H01L2224/13198—Material with a principal constituent of the material being a combination of two or more materials in the form of a matrix with a filler, i.e. being a hybrid material, e.g. segmented structures, foams
    • H01L2224/13199—Material of the matrix
    • H01L2224/1329—Material of the matrix with a principal constituent of the material being a polymer, e.g. polyester, phenolic based polymer, epoxy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
    • H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
    • H01L2224/13001—Core members of the bump connector
    • H01L2224/13099—Material
    • H01L2224/13198—Material with a principal constituent of the material being a combination of two or more materials in the form of a matrix with a filler, i.e. being a hybrid material, e.g. segmented structures, foams
    • H01L2224/13298—Fillers
    • H01L2224/13299—Base material
    • H01L2224/133—Base material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161—Disposition
    • H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161—Disposition
    • H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/16227—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation the bump connector connecting to a bond pad of the item

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Wire Bonding (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【発明の詳細な説明】 産業上の利用分野 本発明は半導体チップ上にパンダを形成する方法に関す
る。
従来の技術 半導体チップと回路との電気的に接続（以下接続と略す
）するには各種の方法が提案されている。
特に近年高密度実装の傾向にあり、例えば第４図のよう
な半導体チップ１のパッド上にはんだバンプ４等を形成
し基板２上の電極パターン３と接続する７工イスダウン
ボンデイング方式や、第５図のようにＡｕバンプ６を形
成してフィルムキャリヤのリード５と接続するＴＡＢ　
（テープオートメートポンディング）方式等が広く知ら
れている。
発明が解決しようとする課題 しかし、前述の従来技術ではバンプを形成するのに、蒸
着によるパイヤメタルの形成や、フォトリソグラフィ工
程、メツキ工程、エツチング工程等を必要とし、通常の
半導体チップを使うことができないという問題点がある
。
本発明は上記問題点に鑑み、新しいバンプ形成方法を提
供することを目的とする。
課題を解決するための手段 本発明の半導体は、パッドより小さい球状の導電−性材
料を用いてバンプ又は媒体とし、基板上の電極パターン
やフィルムキャリヤのリード等と接続するものである。
作　　用 本発明においては、バンプを形成するのに必要とする複
雑なプロセスを不要とし、高信頼性の半導体素子を提供
できる。
実施例 以下実施例を第１図〜第３図を用いて説明する。
第１図の（イ）（ロ）は球状の導電性材料を用いて半導
体チップ１のパッド１ａ上にバンプ７ａを形成する一実
施例を示すものであり、（イ）は例えばワイヤーポンデ
ィングで用いるキャピラリ等に吸引機能をつけ球状の導
電性材料を保持し、半導体チップ１のパッド１ａ上へ移
動させて加圧し、超音波を用いてポンディングを行いバ
ンプ７ａとする。なお、接合部は組成変化しパッドと導
電性材料が接合する。そして、キャピラリ等の形状でバ
ンプ７ａの上にできる小突起部分に導電性の接着樹脂層
８を設けて接続を行う。（ロ）は同じようにしてバンプ
了ａを形成する時、キャピラリ等の球状の導電性材料を
加圧する面を球面とすることによシ導電性の接着樹脂層
８を設けやすくしたものである。なお、この時、バンプ
７ａの小突起上を押さえバンプ７ａの半導体チップ１上
でのバラツキをなくし、導電性の接着樹脂層８の代わシ
に絶縁性の接着樹脂層を設け、加圧により小突起が絶縁
性の接着樹脂を押しやシ接続を行うこともできる。
第２図は本発明の異なる実施例を示すものであり、球状
の導電性材料７を接続の媒体とするものである。なお第
１図と共通のもの要素には同一番号を付す。パッド１ａ
と接する球状の導電□性材料７の円周上に転写法等によ
り導電性の接着樹脂層８ａを設けたものを吸引装置で保
持しパッド１ａ上へ移動させ、球状の導電性材料７を固
着する。
そして球状の導電性材料７の固着した面と反対側円周上
に再度導電性の接着樹脂層８を設けて接続を行うもので
ある。なお、この時、絶縁性の接着樹脂層を代わりに設
け、加圧により球状の導電性材料７が絶縁性の接着樹脂
を押しやり接続を行うこともできる。
第３図は、フィルムキャリヤを用いた、一実施例を示す
ものであり、球状の導電性材料７と密着力の小さい基板
９上に球状の導電性材料７を置き、位置合わせしたフィ
ルムキャリヤのリード６とツール１ｏの加熱、加圧等に
より接続し、フィルムキャリヤのリード５にバンプを形
成するものである。この時フィルムキャリヤのリード５
０代わりに半導体チップのパッドと接続させることもで
きる。
発明の効果 以上述べてきたように、本発明によればバンプを形成す
るだめの複雑なプロセスを必要としない。
従って工程が簡単となりコスト、歩留りを大幅に改善す
ることができる。
【図面の簡単な説明】
第１図は本発明の一実施例の半導体チップのバンプ形成
方法の一工程の要部拡大図、第２図は本発明の異なる実
施例における半導体チップのバンプ形成方法の要部拡大
図、第３図は本発明の実施例におけるフィルムキャリヤ
のリードにバンプを形成する構成の説明図、第４図は従
来例のはんだバンプによるフェースダウンポンディング
方式の半導体素子の側面図、第６図は従来例のメツキに
よるＡｕバンプを用いたＴＡＢ方式の半導体素子の側面
図である。 １・・・・・・半導体チップ、１ａ・・・・・・パッド
、５・・・・・・フィルムキャリヤのリード、７・・・
・・・球状の導電性材料、８・・・・・・導電性の接着
樹脂。 代理人の氏名　弁理士　中　尾　敏　男　ほか１名第　
１　図 （イ）　　　　　　　　　　　　　　　　　　　　　　
　（口］第　２　図 ７球状の導を性才り十 第３図 ＷＥ４ｒＩ！Ｉ ｗＥ５ｒｌ！Ｉ

Claims (4)

    【特許請求の範囲】
  1. （１）半導体チップのパッド上にバンプとなる導電性材
    料片を載置して加圧し、前記パッドと導電性材料片の接
    触部を超音波で組成変化させ接合することを特徴とする
    半導体チップのバンプ形成方法。
  2. （２）導電性材料片は球状であることを特徴とする請求
    項１に記載の半導体チップのバンプ形成方法。
  3. （３）導電性材料片の外径はパッドより小さい形状であ
    ることを特徴とする請求項１または２に記載の半導体チ
    ップのバンプ形成方法。
  4. （４）半導体チップのパッド上にバンプとなる導電性材
    料片を載置し、前記パッドと前記導電性材料片を導電性
    樹脂で接着することを特徴とする半導体チップのバンプ
    形成方法。
JP63041321A 1988-02-24 1988-02-24 半導体チップのバンプ形成方法 Pending JPH01215047A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63041321A JPH01215047A (ja) 1988-02-24 1988-02-24 半導体チップのバンプ形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63041321A JPH01215047A (ja) 1988-02-24 1988-02-24 半導体チップのバンプ形成方法

Publications (1)

Publication Number Publication Date
JPH01215047A true JPH01215047A (ja) 1989-08-29

Family

ID=12605254

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63041321A Pending JPH01215047A (ja) 1988-02-24 1988-02-24 半導体チップのバンプ形成方法

Country Status (1)

Country Link
JP (1) JPH01215047A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05136146A (ja) * 1991-11-15 1993-06-01 Matsushita Electric Ind Co Ltd 半導体装置の電極と検査方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05136146A (ja) * 1991-11-15 1993-06-01 Matsushita Electric Ind Co Ltd 半導体装置の電極と検査方法

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