JPS63118249U - - Google Patents
Info
- Publication number
- JPS63118249U JPS63118249U JP840387U JP840387U JPS63118249U JP S63118249 U JPS63118249 U JP S63118249U JP 840387 U JP840387 U JP 840387U JP 840387 U JP840387 U JP 840387U JP S63118249 U JPS63118249 U JP S63118249U
- Authority
- JP
- Japan
- Prior art keywords
- active layer
- gate electrode
- schottky junction
- cavity
- field effect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 2
- 230000005669 field effect Effects 0.000 claims 2
- 150000001875 compounds Chemical class 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Electrodes Of Semiconductors (AREA)
- Junction Field-Effect Transistors (AREA)
Description
第１図は本考案の一実施例の縦断面図、第２図
は従来の縦断面図である。
１……半絶縁性の化合物半導体基板、２……Ｆ
ＥＴ能動層、３……ゲート電極、４……ゲート長
、５……絶縁膜。
FIG. 1 is a longitudinal sectional view of one embodiment of the present invention, and FIG. 2 is a longitudinal sectional view of a conventional device. 1...Semi-insulating compound semiconductor substrate, 2...F
ET active layer, 3...gate electrode, 4...gate length, 5...insulating film.
Claims (1)
の上面にゲート電極を有し、該能動層と該ゲート
電極の接触面にシヨツトキー接合を有する電界効
果トランジスタにおいて、該能動層と該ゲート電
極の間に絶縁層又は空洞を有し、該絶縁層又は該
空洞の外周においてシヨツトキー接合を有する電
界効果トランジスタ。 In a field effect transistor having an active layer on the upper surface of a semi-insulating substrate, a gate electrode on the upper surface of the active layer, and a Schottky junction at a contact surface between the active layer and the gate electrode, the active layer and the gate electrode have a Schottky junction. A field effect transistor having an insulating layer or a cavity between gate electrodes, and having a Schottky junction at the outer periphery of the insulating layer or the cavity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP840387U JPS63118249U (en) | 1987-01-22 | 1987-01-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP840387U JPS63118249U (en) | 1987-01-22 | 1987-01-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63118249U true JPS63118249U (en) | 1988-07-30 |
Family
ID=30792746
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP840387U Pending JPS63118249U (en) | 1987-01-22 | 1987-01-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63118249U (en) |
-
1987
- 1987-01-22 JP JP840387U patent/JPS63118249U/ja active Pending