JPS6311536Y2 - - Google Patents
Info
- Publication number
- JPS6311536Y2 JPS6311536Y2 JP7732582U JP7732582U JPS6311536Y2 JP S6311536 Y2 JPS6311536 Y2 JP S6311536Y2 JP 7732582 U JP7732582 U JP 7732582U JP 7732582 U JP7732582 U JP 7732582U JP S6311536 Y2 JPS6311536 Y2 JP S6311536Y2
- Authority
- JP
- Japan
- Prior art keywords
- room
- air
- clean
- chamber
- clean room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004140 cleaning Methods 0.000 claims description 4
- 230000002265 prevention Effects 0.000 claims description 4
- 238000005192 partition Methods 0.000 claims description 3
- 239000000428 dust Substances 0.000 description 12
- 230000003749 cleanliness Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000007664 blowing Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
Landscapes
- Filtering Of Dispersed Particles In Gases (AREA)
- Devices For Use In Laboratory Experiments (AREA)
- Ventilation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7732582U JPS58179433U (ja) | 1982-05-25 | 1982-05-25 | クリ−ン室における汚染空気流入防止装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7732582U JPS58179433U (ja) | 1982-05-25 | 1982-05-25 | クリ−ン室における汚染空気流入防止装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58179433U JPS58179433U (ja) | 1983-12-01 |
JPS6311536Y2 true JPS6311536Y2 (fr) | 1988-04-04 |
Family
ID=30086592
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7732582U Granted JPS58179433U (ja) | 1982-05-25 | 1982-05-25 | クリ−ン室における汚染空気流入防止装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58179433U (fr) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010054689A (ja) * | 2008-08-27 | 2010-03-11 | Sumitomo Electric Ind Ltd | 光ファイバ接続用作業台 |
JP5690312B2 (ja) * | 2012-09-18 | 2015-03-25 | 新菱冷熱工業株式会社 | 局所精密空調装置 |
JP2014066467A (ja) * | 2012-09-27 | 2014-04-17 | Sanpo Denki Kk | エアシャワ−装置 |
JP5867728B2 (ja) * | 2012-12-20 | 2016-02-24 | 株式会社大気社 | 調圧室システム |
-
1982
- 1982-05-25 JP JP7732582U patent/JPS58179433U/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS58179433U (ja) | 1983-12-01 |
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