JPS6311536Y2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a device for preventing contaminated air from entering a clean room when a person or object enters the clean room through an air shower room.

Conventional air showers were only intended for cleaning people or objects passing by, so when the door of the clean room is opened after cleaning and a person enters, the dust that is drawn up into the air shower room enters the clean room through the door. It was too hot. Therefore, even if the air shower is used to prevent dust, it is not possible to prevent dust from entering the clean room, resulting in a decrease in the cleanliness of the clean room.

Therefore, the present invention provides a pre-chamber between the air shower room and the clean room to prevent the diffused dust in the air shower room from being carried directly to the clean room, and to make the pre-chamber pressure lower than the clean room pressure. The purpose is to prevent dust from flowing into the clean room.

Next, the contaminated air inflow prevention device of the present invention will be explained with reference to FIG. The air shower room 1 has a plurality of air shower nozzles 2 attached to the ceiling or side walls, and a discharge port 3 for discharging indoor air to the floor. The discharge port 3 is communicated with the air shower nozzle 2 through a conduit 6 having a fan 4 and a filter 5 in the middle. A conduit 6 between the filter 5 and the fan 4 is connected to a branch pipe 7, and an on-off valve 8 is provided in the middle to communicate with a low-level clean room or the atmosphere. The on-off valve 8 is opened by a control device to be described later when the entrance door of the clean room is opened, and the air sent to the filter 5 is controlled so that the air shower room has a negative pressure compared to the clean room.

A partition member 9, such as a curtain or a door, is provided on the exit side of the air shower chamber 1 opposite to the entrance 1a, and an auxiliary room 10 is provided outside the partition member 9. The preliminary chamber 10 is provided with a blowout port 11 for blowing out laminar clean air from the entire ceiling, and a discharge port 12 for air outflow is provided in the floor. Outlet 1
2 is communicated with the spout 11 via a conduit 15 having a fan 13 and a filter 14 in the middle, thereby forming an air cleaning device for the preliminary chamber. The conduit between the fan 13 and the filter 14 is communicated with a branch pipe 17 having an on-off valve 16 in the middle, and its tip is communicated with a low-level clean room or the atmosphere. In addition, the on-off valve 16
is opened by a control device to be described later when the entrance door of the clean room is opened, and the air sent to the filter 14 is controlled so that the air shower room has a negative pressure compared to the clean room.

An entrance door 18a of the clean chamber 18 is provided on the exit side of the preliminary chamber 10, and an on-off valve control device 19 is provided on the door 18a, which operates in response to opening of the door 18a. The on-off valve control device is composed of an electric circuit and the like, and when the door 18a is opened, the two on-off valves 8, 16 are switched open to allow each fan 4, 13 to pass through each filter 5, 1.
The amount of air sent to the air shower chamber 4 is released from each branch pipe 7, 17 so that the air shower chamber becomes a negative pressure, and the pressure inside the air shower chamber 1 and the preliminary chamber 10 is lowered. Note that when the door 18a is closed, the on-off valve control device keeps each on-off valve 8, 16 closed.

The contaminated air inflow prevention device of the present invention is constructed as described above, and when working in the clean room 18, the air shower room 1 is first entered, and the air blown out from the air shower 2 removes dust adhering to people. Air from the floor of the air shower chamber 1 enters the conduit 6 via the outlet 3 and is returned to the filter by the fan 4.

Next, in order to move to the clean room 18, the door 18
When a is opened, the on-off valve control device 19 operates,
The on-off valves 8 and 16 are opened to reduce the amount of air sent to the filter 5 of the air shower chamber 1 and the filter 14 of the preliminary chamber 10.
Reduce internal pressure. This lowered pressure is lower than the pressure inside the clean chamber 18. Air shower room 1
When the person inside moves to the preliminary room 10, the scattered dust floating in the air flows out in the direction of the exhaust port 12 by the laminar flow air coming out of the jet port 11. Therefore, even if a person moves further into the clean room 18, hardly any dust is carried into the clean room 18.
In addition, since the pressure inside the preliminary chamber 10 is lower than the internal pressure of the clean chamber 18, the dust in the preliminary chamber is removed from the clean chamber 18.
It does not flow into 8.

As described above, according to the present invention, since the auxiliary chamber is provided between the air shower room and the clean room, the dust removed in the air shower chamber is not carried to the clean room, and the pressure in the auxiliary chamber is reduced to the clean room. Since the pressure is lower than that of , the scattered dust in the preliminary chamber does not flow into the clean chamber, and the cleanliness inside the clean chamber is maintained at a good level.

Note that if a pressure difference is constantly created between the clean room and the air shower room, it is necessary to increase the structural strength of the room, door, etc., but in the case of this example, the pressure difference is created only when the entrance door of the clean room is opened. Therefore, even a normal structure can sufficiently withstand the pressure difference between the clean room and the shower room.

Next, a second embodiment of the present invention will be explained with reference to FIG. In this embodiment, instead of reducing the amount of air sent into the air shower chamber 1 by opening the on-off valve 8,
A conduit 21 having an exhaust fan 20 in the middle is connected to the outlet of the exhaust port on the floor of the air shower chamber 1, and when the door 18a of the clean chamber 18 is opened, the exhaust fan 20 is operated to forcibly discharge the air shower chamber 1. This allows the air inside to escape and lowers the pressure.

Therefore, when the entrance door of the clean chamber 18 is opened, the exhaust fan 20 is operated and the pressure inside the air shower chamber 1 is reduced, and the pressure inside the air shower chamber 1 is accordingly reduced.
Since the pressure inside 0 also decreases, the magnitude of the pressure is in the order of the clean room, the preparatory room, and the air shower room, starting from the largest. Therefore, like the first embodiment, no dust is allowed to flow into the clean chamber 18.

Note that, as in the first embodiment, the amount of air sent to the preliminary chamber between the air shower chamber 1 and the clean chamber 18 is
A configuration may be added in which the amount is reduced by opening an on-off valve.

[Brief explanation of drawings]

Figure 1 is a schematic explanatory diagram of the contaminated air inflow prevention device in a clean room of the present invention, and Figure 2 is a
FIG. 2 is a schematic explanatory diagram of an example. 1... Air shower room, 4... Juan, 5...
Filter, 8...Opening/closing valve, 10...Preparation chamber, 13
...fan, 14... filter, 16... on-off valve, 19... on-off valve control device.

Claims (1)

[Scope of utility model registration request] An auxiliary room is formed between the air shower room, which cleans people and objects entering the clean room, and the clean room, and an air cleaning device that blows out a laminar flow of clean air is installed in the auxiliary room. Contaminated air in a clean room that is equipped with a partition member that can be opened and closed between the clean room and the auxiliary room, and a pressure control device that lowers the pressure in the auxiliary room at least below the clean room pressure in response to the opening of the entrance door between the clean room and the auxiliary room. Inflow prevention device.