JPS58179433U - Contaminated air inflow prevention device in clean room - Google Patents
Contaminated air inflow prevention device in clean roomInfo
- Publication number
- JPS58179433U JPS58179433U JP7732582U JP7732582U JPS58179433U JP S58179433 U JPS58179433 U JP S58179433U JP 7732582 U JP7732582 U JP 7732582U JP 7732582 U JP7732582 U JP 7732582U JP S58179433 U JPS58179433 U JP S58179433U
- Authority
- JP
- Japan
- Prior art keywords
- room
- clean room
- clean
- auxiliary
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
- Devices For Use In Laboratory Experiments (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
゛第１図は本考案のクリーン室における汚染空気流入防
止装置の概略説明図、第２図は同じく第２実施例の概略
説明図である。
１・・・エアシャワー室、４・・・ファン、５・・・フ
ィルタ、８・・・開閉弁、１［・・・予備室、１３・・
・ファン、 □１４・・・フィルタ、１６・・・開閉弁
、１９・・・面間弁制御装置。1 is a schematic explanatory diagram of a device for preventing inflow of contaminated air into a clean room according to the present invention, and FIG. 2 is a schematic explanatory diagram of a second embodiment. 1...Air shower room, 4...Fan, 5...Filter, 8...Opening/closing valve, 1[...Preliminary room, 13...
-Fan, □14...Filter, 16...Opening/closing valve, 19...Face-to-face valve control device.
Claims (1)
室と、クリーン室との間に予備室を形成し、該予備室に
層流のクリーイ空気を噴出する空気清浄装置を設けると
ともに室アシャワー室との間に開閉可能な仕切部材を設
け、クリーン室と予備室の間の入口ドアの開放に応じて
少くとも予備室内の圧力をクリーン室内圧力より下げる
圧力制御装置を設けたところのクリーン室における汚染
空気流入防止装置。An auxiliary room is formed between the air shower room, which cleans the air for people and objects entering the clean room, and the clean room, and the auxiliary room is equipped with an air purifying device that blows out laminar flow of clean air. A clean room with a partition member that can be opened and closed between the clean room and the auxiliary room, and a pressure control device that lowers at least the pressure in the auxiliary room below the pressure in the clean room in response to the opening of the entrance door between the clean room and the auxiliary room. Contaminated air inflow prevention device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7732582U JPS58179433U (en) | 1982-05-25 | 1982-05-25 | Contaminated air inflow prevention device in clean room |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7732582U JPS58179433U (en) | 1982-05-25 | 1982-05-25 | Contaminated air inflow prevention device in clean room |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58179433U true JPS58179433U (en) | 1983-12-01 |
| JPS6311536Y2 JPS6311536Y2 (en) | 1988-04-04 |
Family
ID=30086592
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7732582U Granted JPS58179433U (en) | 1982-05-25 | 1982-05-25 | Contaminated air inflow prevention device in clean room |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58179433U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010054689A (en) * | 2008-08-27 | 2010-03-11 | Sumitomo Electric Ind Ltd | Working table for splicing optical fibers |
| JP2014057922A (en) * | 2012-09-18 | 2014-04-03 | Shinryo Corp | Spot precision air conditioner |
| JP2014066467A (en) * | 2012-09-27 | 2014-04-17 | Sanpo Denki Kk | Air shower device |
| JP2014121671A (en) * | 2012-12-20 | 2014-07-03 | Taikisha Ltd | Pressure adjusting chamber system |
-
1982
- 1982-05-25 JP JP7732582U patent/JPS58179433U/en active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010054689A (en) * | 2008-08-27 | 2010-03-11 | Sumitomo Electric Ind Ltd | Working table for splicing optical fibers |
| JP2014057922A (en) * | 2012-09-18 | 2014-04-03 | Shinryo Corp | Spot precision air conditioner |
| JP2014066467A (en) * | 2012-09-27 | 2014-04-17 | Sanpo Denki Kk | Air shower device |
| JP2014121671A (en) * | 2012-12-20 | 2014-07-03 | Taikisha Ltd | Pressure adjusting chamber system |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6311536Y2 (en) | 1988-04-04 |
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