JPS60151590U - Pass box in clean room - Google Patents
Pass box in clean roomInfo
- Publication number
- JPS60151590U JPS60151590U JP3906284U JP3906284U JPS60151590U JP S60151590 U JPS60151590 U JP S60151590U JP 3906284 U JP3906284 U JP 3906284U JP 3906284 U JP3906284 U JP 3906284U JP S60151590 U JPS60151590 U JP S60151590U
- Authority
- JP
- Japan
- Prior art keywords
- pass box
- clean room
- room
- clean
- dirty
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning In General (AREA)
- Ventilation (AREA)
- Devices For Use In Laboratory Experiments (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案に係るクリーンルームにおけるパスボッ
クスの側面図、第２図はその横断平面図、第３図及び第
４図は夫々清浄空気流入口の開閉装置の開閉状態を示す
横断平面図である。
１・・・クリーンルーム、２・・・ダーティルーム、３
・・・隔壁、４・・・パスボックス本体、５・・・清浄
空気流入口、６・・・差圧ダンパ。Fig. 1 is a side view of a pass box in a clean room according to the present invention, Fig. 2 is a cross-sectional plan view thereof, and Figs. 3 and 4 are cross-sectional plan views showing the opening and closing states of the opening/closing device of the clean air inlet, respectively. be. 1...Clean room, 2...Dirty room, 3
... Bulkhead, 4... Pass box body, 5... Clean air inlet, 6... Differential pressure damper.
Claims (1)
して間両ルームに跨って配設されたパスボックス本体４
におけるクリーンルーム１側に清浄空気流入口５を配設
するとともに、ダーティルーム２側に前記両ルーム１，
２の差圧を検知して前記パスボックス本体４内に流入し
た清浄空気をダーティルーム２側に放出する差圧ダンパ
６を配設してなることを特徴とするクリーンルームにお
けるパスボックス。A pass box main body 4 penetrates the partition wall 3 between the clean room 1 and the dirty room 2 and is disposed astride both rooms.
A clean air inlet 5 is provided on the clean room 1 side, and both rooms 1 and 2 are provided on the dirty room 2 side.
A pass box for a clean room, characterized in that a differential pressure damper 6 is disposed to detect the differential pressure between the two and discharge clean air flowing into the pass box main body 4 to the dirty room 2 side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3906284U JPS60151590U (en) | 1984-03-21 | 1984-03-21 | Pass box in clean room |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3906284U JPS60151590U (en) | 1984-03-21 | 1984-03-21 | Pass box in clean room |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60151590U true JPS60151590U (en) | 1985-10-08 |
Family
ID=30546655
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3906284U Pending JPS60151590U (en) | 1984-03-21 | 1984-03-21 | Pass box in clean room |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60151590U (en) |
-
1984
- 1984-03-21 JP JP3906284U patent/JPS60151590U/en active Pending
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