JPS6310916B2 - - Google Patents

Info

Publication number
JPS6310916B2
JPS6310916B2 JP55035373A JP3537380A JPS6310916B2 JP S6310916 B2 JPS6310916 B2 JP S6310916B2 JP 55035373 A JP55035373 A JP 55035373A JP 3537380 A JP3537380 A JP 3537380A JP S6310916 B2 JPS6310916 B2 JP S6310916B2
Authority
JP
Japan
Prior art keywords
gas
discharge
discharge space
laser
laser device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55035373A
Other languages
English (en)
Japanese (ja)
Other versions
JPS56131983A (en
Inventor
Shuji Ogawa
Shigenori Yagi
Norikazu Tabata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP3537380A priority Critical patent/JPS56131983A/ja
Publication of JPS56131983A publication Critical patent/JPS56131983A/ja
Publication of JPS6310916B2 publication Critical patent/JPS6310916B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0975—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser using inductive or capacitive excitation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/04—Arrangements for thermal management
    • H01S3/041—Arrangements for thermal management for gas lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/081—Construction or shape of optical resonators or components thereof comprising three or more reflectors

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
JP3537380A 1980-03-19 1980-03-19 Gas laser device Granted JPS56131983A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3537380A JPS56131983A (en) 1980-03-19 1980-03-19 Gas laser device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3537380A JPS56131983A (en) 1980-03-19 1980-03-19 Gas laser device

Publications (2)

Publication Number Publication Date
JPS56131983A JPS56131983A (en) 1981-10-15
JPS6310916B2 true JPS6310916B2 (en, 2012) 1988-03-10

Family

ID=12440089

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3537380A Granted JPS56131983A (en) 1980-03-19 1980-03-19 Gas laser device

Country Status (1)

Country Link
JP (1) JPS56131983A (en, 2012)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4222130C2 (de) * 1992-07-06 1995-12-14 Heraeus Noblelight Gmbh Hochleistungsstrahler
DE19747060A1 (de) 1997-10-24 1999-05-06 Trumpf Lasertechnik Gmbh Laserresonator mit konischem Spiegel
KR20000056778A (ko) * 1999-02-22 2000-09-15 송순달 구리 이온 레이저
JP5940239B2 (ja) * 2009-11-02 2016-06-29 株式会社イー・スクエア プラズマ表面処理装置およびその製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3900804A (en) * 1973-12-26 1975-08-19 United Aircraft Corp Multitube coaxial closed cycle gas laser system
JPS6026310B2 (ja) * 1977-07-26 1985-06-22 三菱電機株式会社 ガスレ−ザ装置

Also Published As

Publication number Publication date
JPS56131983A (en) 1981-10-15

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