JPS6420682A - Gas laser apparatus excited by high frequency discharge - Google Patents

Gas laser apparatus excited by high frequency discharge

Info

Publication number
JPS6420682A
JPS6420682A JP17586887A JP17586887A JPS6420682A JP S6420682 A JPS6420682 A JP S6420682A JP 17586887 A JP17586887 A JP 17586887A JP 17586887 A JP17586887 A JP 17586887A JP S6420682 A JPS6420682 A JP S6420682A
Authority
JP
Japan
Prior art keywords
electrodes
discharge tube
high frequency
extension
periphery
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17586887A
Other languages
Japanese (ja)
Inventor
Takaaki Murata
Kiyohisa Terai
Eiji Kaneko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP17586887A priority Critical patent/JPS6420682A/en
Publication of JPS6420682A publication Critical patent/JPS6420682A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube

Abstract

PURPOSE:To prevent effectively the temperature of metal electrodes from rising to reduce the difference of extension between the metal electrodes and a discharge tube owing to thermal expansion, thereby preventing effectively the discharge tube from being damaged, by forming cooling fins on the periphery of the metal electrodes which are disposed on the periphery of the discharge tube. CONSTITUTION:Laser medium gas 6, which is charged into a discharge tube 1 of a gas laser apparatus, is forced to circulate through a duct 8 having a blower 7, heat exchangers 8a and 8b in the line thereof. Metal electrode 2a and 2b are disposed on the periphery of the discharge tube 1 and cooling fins 10a and 10b are disposed on the respective electrodes 2a and 2b. And the heat of the electrodes 2a, 2b exposed in the center part is radiated into the outside air through the respective fins 10a, 10b to prevent the temperature of the electrodes 2a, 2b from rising, thereby the extension of the electrodes 2a, 2b being reduced to decrease the difference of the extension between the electrodes 2a, 2b and the discharge tube 1. The high frequency voltage from a high frequency power supply is applied to both of the electrodes 2a, 2b of this apparatus to generate the high frequency discharge 11, thereby the gas therein is excited and the laser is oscillated in the resonator which is comprised of a total reflecting mirror 5 and an output mirror 4 to output a laser beam 12.
JP17586887A 1987-07-16 1987-07-16 Gas laser apparatus excited by high frequency discharge Pending JPS6420682A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17586887A JPS6420682A (en) 1987-07-16 1987-07-16 Gas laser apparatus excited by high frequency discharge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17586887A JPS6420682A (en) 1987-07-16 1987-07-16 Gas laser apparatus excited by high frequency discharge

Publications (1)

Publication Number Publication Date
JPS6420682A true JPS6420682A (en) 1989-01-24

Family

ID=16003608

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17586887A Pending JPS6420682A (en) 1987-07-16 1987-07-16 Gas laser apparatus excited by high frequency discharge

Country Status (1)

Country Link
JP (1) JPS6420682A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH031585A (en) * 1989-05-29 1991-01-08 Fanuc Ltd Discharge tube for laser oscillator
JP2000058944A (en) * 1998-05-20 2000-02-25 Cymer Inc Highly reliable modular manufacture high-quality narrow band high repeat rate f2 laser
US8926352B2 (en) 2010-11-03 2015-01-06 HARTING Electronics GmbH Contact element for plug-in connector socket

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH031585A (en) * 1989-05-29 1991-01-08 Fanuc Ltd Discharge tube for laser oscillator
JP2000058944A (en) * 1998-05-20 2000-02-25 Cymer Inc Highly reliable modular manufacture high-quality narrow band high repeat rate f2 laser
US8926352B2 (en) 2010-11-03 2015-01-06 HARTING Electronics GmbH Contact element for plug-in connector socket

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